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| | | #define STEP_EQ_STORED_JOB15 _T("EQStoredJobReport15") |
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| | | #define STEP_EQ_DISPATCHINT_MODE_CHANGE _T("EQDispatchingModeChangeCommand") |
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| | | #define STEP_EFEM_ROBOT_CMD _T("EFEMRobotCmd") |
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| | | #define STEP_EFEM_IN_OP_MODE_CHANGE _T("EFEMIndexerOperationModeChangeCommand") |
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| | | #define STEP_ID_FETCHED_OUT_JOB_REPORT13 0x5BB |
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| | | #define STEP_ID_FETCHED_OUT_JOB_REPORT14 0x5BC |
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| | | #define STEP_ID_FETCHED_OUT_JOB_REPORT15 0x5BD |
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| | | #define STEP_ID_DISPATCHING_MODE_CHANGE_REPLY 0x5E2 |
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| | | #define STEP_ID_IN_OP_CMD_REPLY 0x5F0 |
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| | | #define STEP_ID_DISPATCHING_MODE_CHANGE_REPLY 0x5F1 |
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| | | #define STEP_ID_PORT1_TYPE_CHANGE 0x600 |
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| | | #define STEP_ID_PORT2_TYPE_CHANGE 0x601 |
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| | | #define STEP_ID_PORT3_TYPE_CHANGE 0x602 |
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| | | #define STEP_ID_ROBOT_CMD_REPLY 0x6b0 |
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| | | /* base alarm */ |
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| | | #define BASE_ALARM_EFEM 10000 |
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| | | #define BASE_ALARM_BONDER1 20000 |
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