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| | | #define STEP_EQ_DISPATCHINT_MODE_CHANGE _T("EQDispatchingModeChangeCommand") |
| | | #define STEP_EFEM_ROBOT_CMD _T("EFEMRobotCmd") |
| | | #define STEP_EFEM_IN_OP_MODE_CHANGE _T("EFEMIndexerOperationModeChangeCommand") |
| | | |
| | | #define STEP_PORT1_TYPE_CHANGE _T("Port1TypeChange") |
| | | #define STEP_PORT2_TYPE_CHANGE _T("Port2TypeChange") |
| | | #define STEP_PORT3_TYPE_CHANGE _T("Port3TypeChange") |
| | | #define STEP_PORT4_TYPE_CHANGE _T("Port4TypeChange") |
| | | #define STEP_PORT1_MODE_CHANGE _T("Port1ModeChange") |
| | | #define STEP_PORT2_MODE_CHANGE _T("Port2ModeChange") |
| | | #define STEP_PORT3_MODE_CHANGE _T("Port3ModeChange") |
| | | #define STEP_PORT4_MODE_CHANGE _T("Port4ModeChange") |
| | | #define STEP_PORT1_TRANSFER_MODE_CHANGE _T("Port1TransferModeChange") |
| | | #define STEP_PORT2_TRANSFER_MODE_CHANGE _T("Port2TransferModeChange") |
| | | #define STEP_PORT3_TRANSFER_MODE_CHANGE _T("Port3TransferModeChange") |
| | | #define STEP_PORT4_TRANSFER_MODE_CHANGE _T("Port4TransferModeChange") |
| | | #define STEP_PORT1_ENABLE_MODE_CHANGE _T("Port1EnableModeChange") |
| | | #define STEP_PORT2_ENABLE_MODE_CHANGE _T("Port2EnableModeChange") |
| | | #define STEP_PORT3_ENABLE_MODE_CHANGE _T("Port3EnableModeChange") |
| | | #define STEP_PORT4_ENABLE_MODE_CHANGE _T("Port4EnableModeChange") |
| | | #define STEP_PORT1_TYPE_AUTO_CHANGE _T("Port1TypeAutoChange") |
| | | #define STEP_PORT2_TYPE_AUTO_CHANGE _T("Port2TypeAutoChange") |
| | | #define STEP_PORT3_TYPE_AUTO_CHANGE _T("Port3TypeAutoChange") |
| | | #define STEP_PORT4_TYPE_AUTO_CHANGE _T("Port4TypeAutoChange") |
| | | #define STEP_PORT1_CASSETTE_TYPE_CHANGE _T("Port1CassetteTypeChange") |
| | | #define STEP_PORT2_CASSETTE_TYPE_CHANGE _T("Port2CassetteTypeChange") |
| | | #define STEP_PORT3_CASSETTE_TYPE_CHANGE _T("Port3CassetteTypeChange") |
| | | #define STEP_PORT4_CASSETTE_TYPE_CHANGE _T("Port4CassetteTypeChange") |
| | | |
| | | |
| | | /* Step ID */ |
| | |
| | | #define STEP_ID_PORT4_INUSE 0x653 |
| | | #define STEP_ID_PORT4_UNLOAD_READY 0x65b |
| | | #define STEP_ID_PORT4_BLOCKED 0x663 |
| | | #define STEP_ID_ROBOT_CMD_REPLY 0x6b0 |
| | | #define STEP_ID_PROT1_TYPE_CHANGE_REPLY 0x670 |
| | | #define STEP_ID_PROT2_TYPE_CHANGE_REPLY 0x671 |
| | | #define STEP_ID_PROT3_TYPE_CHANGE_REPLY 0x672 |
| | | #define STEP_ID_PROT4_TYPE_CHANGE_REPLY 0x673 |
| | | #define STEP_ID_PROT1_MODE_CHANGE_REPLY 0x678 |
| | | #define STEP_ID_PROT2_MODE_CHANGE_REPLY 0x679 |
| | | #define STEP_ID_PROT3_MODE_CHANGE_REPLY 0x67A |
| | | #define STEP_ID_PROT4_MODE_CHANGE_REPLY 0x67B |
| | | #define STEP_ID_PROT1_TRANSFER_MODE_CHANGE_REPLY 0x680 |
| | | #define STEP_ID_PROT2_TRANSFER_MODE_CHANGE_REPLY 0x681 |
| | | #define STEP_ID_PROT3_TRANSFER_MODE_CHANGE_REPLY 0x682 |
| | | #define STEP_ID_PROT4_TRANSFER_MODE_CHANGE_REPLY 0x683 |
| | | #define STEP_ID_PROT1_ENABLE_MODE_CHANGE_REPLY 0x688 |
| | | #define STEP_ID_PROT2_ENABLE_MODE_CHANGE_REPLY 0x689 |
| | | #define STEP_ID_PROT3_ENABLE_MODE_CHANGE_REPLY 0x68A |
| | | #define STEP_ID_PROT4_ENABLE_MODE_CHANGE_REPLY 0x68B |
| | | #define STEP_ID_PROT1_TYPE_AUTO_CHANGE_REPLY 0x690 |
| | | #define STEP_ID_PROT2_TYPE_AUTO_CHANGE_REPLY 0x691 |
| | | #define STEP_ID_PROT3_TYPE_AUTO_CHANGE_REPLY 0x692 |
| | | #define STEP_ID_PROT4_TYPE_AUTO_CHANGE_REPLY 0x693 |
| | | #define STEP_ID_PROT1_CASSETTE_TYPE_CHANGE_REPLY 0x698 |
| | | #define STEP_ID_PROT2_CASSETTE_TYPE_CHANGE_REPLY 0x699 |
| | | #define STEP_ID_PROT3_CASSETTE_TYPE_CHANGE_REPLY 0x69A |
| | | #define STEP_ID_PROT4_CASSETTE_TYPE_CHANGE_REPLY 0x69B |
| | | #define STEP_ID_ROBOT_CMD_REPLY 0x6b0 |
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