DVID,DV Name,DV Format,DV Remark 6000,Bonder_SV_ProcessStep,A20,Bonder SV: 工艺运行步骤 6001,Bonder_SV_BladderPressure,A20,Bonder SV: 气囊压力当前 6002,Bonder_SV_UpperChamberPressure,A20,Bonder SV: 上腔压力合计 6003,Bonder_SV_PipeVacuumGauge,A20,Bonder SV: 管道真空表 6004,Bonder_SV_ChamberVacuumGauge,A20,Bonder SV: 腔体真空表 6005,Bonder_SV_UpperTemp1,A20,Bonder SV: 上腔温度1 6006,Bonder_SV_UpperTemp2,A20,Bonder SV: 上腔温度2 6007,Bonder_SV_UpperTemp3,A20,Bonder SV: 上腔温度3 6008,Bonder_SV_UpperTemp4,A20,Bonder SV: 上腔温度4 6009,Bonder_SV_UpperTemp5,A20,Bonder SV: 上腔温度5 6010,Bonder_SV_UpperTemp6,A20,Bonder SV: 上腔温度6 6011,Bonder_SV_LowerTemp1,A20,Bonder SV: 下腔温度1 6012,Bonder_SV_LowerTemp2,A20,Bonder SV: 下腔温度2 6013,Bonder_SV_LowerTemp3,A20,Bonder SV: 下腔温度3 6014,Bonder_SV_LowerTemp4,A20,Bonder SV: 下腔温度4 6015,Bonder_SV_LowerTemp5,A20,Bonder SV: 下腔温度5 6016,Bonder_SV_LowerTemp6,A20,Bonder SV: 下腔温度6 6017,Bonder_SV_HeatingRemaining,A20,Bonder SV: 加热剩余时间 6018,Bonder_SV_PressingRemaining,A20,Bonder SV: 压合剩余时间 6100,Bonder_PD_AlignDelay,A20,Bonder PD: 对位延时 6101,Bonder_PD_DwellTime,A20,Bonder PD: 保压时间 6102,Bonder_PD_BreakVacuumDelay,A20,Bonder PD: 破真空延时 6103,Bonder_PD_TurboPumpStartDelay,A20,Bonder PD: 分子泵启动延时 6104,Bonder_PD_AttachVacuumDelay,A20,Bonder PD: 抽真空延时 6105,Bonder_PD_HeatingWaitDelay,A20,Bonder PD: 等待加热延时 6106,Bonder_PD_BladderPressureSet,A20,Bonder PD: 气囊压力设定 6107,Bonder_PD_BladderPressurizeRate,A20,Bonder PD: 气囊加压速率 6108,Bonder_PD_BladderDepressurizeRate,A20,Bonder PD: 气囊泄压速率 6109,Bonder_PD_AttachPressureLimit,A20,Bonder PD: 贴合压力上限 6110,Bonder_PD_UpperZTorqueSpeed,A20,Bonder PD: 上腔Z预贴合速度 6111,Bonder_PD_UpperTempSet,A20,Bonder PD: 上腔温度设定 6112,Bonder_PD_LowerTempSet,A20,Bonder PD: 下腔温度设定 6113,Bonder_PD_PreAttachSpeed,A20,Bonder PD: 预贴合速度 6114,Bonder_PD_AttachSpeed,A20,Bonder PD: 贴合速度 6115,Bonder_PD_UpperHeatDistance,A20,Bonder PD: 上腔加热距离 6116,Bonder_PD_AttachPressIn,A20,Bonder PD: 贴合压入力 6117,Bonder_PD_UpperBreakVacuumDist,A20,Bonder PD: 上腔破真空距离 6118,Bonder_PD_LowerPinBreakVacuumDist,A20,Bonder PD: 下顶针破真空距离 6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder PD: 下顶针加热距离 6120,Bonder_PD_PumpGaugeSet,A20,Bonder PD: 真空泵真空设定 6121,Bonder_PD_TurboReachSet,A20,Bonder PD: 分子泵到达设定 6200,VacuumBake_SV_A_ProcessStep,A20,VacuumBake SV A: 工艺运行步骤 6201,VacuumBake_SV_A_ChamberVacuum,A20,VacuumBake SV A: 腔体真空 6202,VacuumBake_SV_A_Temp1,A20,VacuumBake SV A: 温度1 6203,VacuumBake_SV_A_Temp2,A20,VacuumBake SV A: 温度2 6204,VacuumBake_SV_A_Temp4,A20,VacuumBake SV A: 温度4 6205,VacuumBake_SV_A_Temp5,A20,VacuumBake SV A: 温度5 6206,VacuumBake_SV_A_Temp6,A20,VacuumBake SV A: 温度6 6207,VacuumBake_SV_A_Temp7,A20,VacuumBake SV A: 温度7 6208,VacuumBake_SV_A_BakeRemaining,A20,VacuumBake SV A: 烘烤剩余时间 6209,VacuumBake_SV_B_ProcessStep,A20,VacuumBake SV B: 工艺运行步骤 6210,VacuumBake_SV_B_ChamberVacuum,A20,VacuumBake SV B: 腔体真空 6211,VacuumBake_SV_B_Temp1,A20,VacuumBake SV B: 温度1 6212,VacuumBake_SV_B_Temp2,A20,VacuumBake SV B: 温度2 6213,VacuumBake_SV_B_Temp4,A20,VacuumBake SV B: 温度4 6214,VacuumBake_SV_B_Temp5,A20,VacuumBake SV B: 温度5 6215,VacuumBake_SV_B_Temp6,A20,VacuumBake SV B: 温度6 6216,VacuumBake_SV_B_Temp7,A20,VacuumBake SV B: 温度7 6217,VacuumBake_SV_B_BakeRemaining,A20,VacuumBake SV B: 烘烤剩余时间 6300,VacuumBake_PD_ParamIndex,A20,VacuumBake PD: 参数序号 6301,VacuumBake_PD_HeatTime,A20,VacuumBake PD: 加热时间 6302,VacuumBake_PD_BreakVacuumTime,A20,VacuumBake PD: 破真空时间 6303,VacuumBake_PD_VacuumReach,A20,VacuumBake PD: 真空达到值 6304,VacuumBake_PD_TempSet,A20,VacuumBake PD: 主控温度设定 6400,BakeCooling_SV_A_BakeStep,A20,BakeCooling SV A: 烘烤步骤 6401,BakeCooling_SV_A_Temp1,A20,BakeCooling SV A: 温度1 6402,BakeCooling_SV_A_Temp2,A20,BakeCooling SV A: 温度2 6403,BakeCooling_SV_A_Temp4,A20,BakeCooling SV A: 温度4 6404,BakeCooling_SV_A_Temp5,A20,BakeCooling SV A: 温度5 6405,BakeCooling_SV_A_Temp6,A20,BakeCooling SV A: 温度6 6406,BakeCooling_SV_A_Temp7,A20,BakeCooling SV A: 温度7 6407,BakeCooling_SV_A_BakeRemaining,A20,BakeCooling SV A: 烘烤剩余时间 6408,BakeCooling_SV_A_CoolStep,A20,BakeCooling SV A: 冷却步骤 6409,BakeCooling_SV_A_CoolRemaining,A20,BakeCooling SV A: 冷却剩余时间 6410,BakeCooling_SV_B_BakeStep,A20,BakeCooling SV B: 烘烤步骤 6411,BakeCooling_SV_B_Temp1,A20,BakeCooling SV B: 温度1 6412,BakeCooling_SV_B_Temp2,A20,BakeCooling SV B: 温度2 6413,BakeCooling_SV_B_Temp4,A20,BakeCooling SV B: 温度4 6414,BakeCooling_SV_B_Temp5,A20,BakeCooling SV B: 温度5 6415,BakeCooling_SV_B_Temp6,A20,BakeCooling SV B: 温度6 6416,BakeCooling_SV_B_Temp7,A20,BakeCooling SV B: 温度7 6417,BakeCooling_SV_B_BakeRemaining,A20,BakeCooling SV B: 烘烤剩余时间 6418,BakeCooling_SV_B_CoolStep,A20,BakeCooling SV B: 冷却步骤 6419,BakeCooling_SV_B_CoolRemaining,A20,BakeCooling SV B: 冷却剩余时间 6500,BakeCooling_PD_ParamIndex,A20,BakeCooling PD: 参数序号 6501,BakeCooling_PD_TimeOrTemp1,A20,BakeCooling PD: 时间/温度1 6502,BakeCooling_PD_TimeOrTemp2,A20,BakeCooling PD: 时间/温度2 6503,BakeCooling_PD_Reserved,A20,BakeCooling PD: 预留 6600,Measurement_SV_ProcessStep,A20,Measurement SV: 工艺运行步骤 6601,Measurement_SV_AOIScore,A20,Measurement SV: AOI分数 6700,Measurement_PD_ParamIndex,A20,Measurement PD: 参数序号 6701,Measurement_PD_Time,A20,Measurement PD: 时间 6702,Measurement_PD_Value1,A20,Measurement PD: 测量值1 6703,Measurement_PD_Value2,A20,Measurement PD: 测量值2 10200,SlotMap,U1,SlotMap(Scan) 10201,SlotMapScan,U1,SlotMap(Scan) 10202,SlotMapDownload,U1,SlotMap(Download)