{"text_format":"3","workbook":"xls","n_sheets":8,"sheets":["SF","CEID","ReportID","ECID","DVID","SVID","Alarm List","ReadMe"],"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"SF","index":0,"n_rows":73,"n_cols":7,"rows_kept":73,"merged":[[0,0,0,6],[2,0,11,0],[12,0,31,0],[33,0,40,0],[41,0,46,0],[47,0,56,0],[57,0,62,0],[63,0,64,0],[65,0,68,0],[70,0,72,0]],"flags":["formulas_cached_only"]}
["Stream Functions"]
["Stream","Function","Description","Chinese description","Direction","Support","Comment"]
["S1","F1","Are You There Request","你在吗请求","H↔E","O"]
[null,"F2","Online Data","在线数据","H↔E","O"]
[null,"F3","Selected Equipment Status Request","选定设备状态请求","H→E","O"]
[null,"F4","Selected Equipment Status Data","选定的设备状态数据","H←E","O"]
[null,"F13","Establish Communications Request","建立通讯请求","H↔E","O"]
[null,"F14","Establish Communications Request Acknowledge","建立通信请求确认","H↔E","O"]
[null,"F15","Request Offline Request","请求离线请求","H→E","O"]
[null,"F16","Offline Acknowledge","离线确认","H←E","O"]
[null,"F17","Request Online Request","请求在线请求","H→E","O"]
[null,"F18","Online Acknowledge","在线确认","H←E","O"]
["S2","F13","Equipment Constant Request","设备不断请求","H↔E","O"]
[null,"F14","Equipment Constant Data","设备常数数据","H↔E","O"]
[null,"F17","Date and Time Request","日期和时间请求","H↔E","O"]
[null,"F18","Date and Time Data","日期和时间数据","H↔E","O"]
[null,"F23","Trace Initialization Send","跟踪初始化发送","H→E","×"]
[null,"F24","Trace Initialization Acknowledge","跟踪初始化确认","H←E","×"]
[null,"F25","Loop-back Diagnostic Request","环回诊断请求","H↔E","×"]
[null,"F26","Loop-back Diagnostic Data","环回诊断数据","H↔E","×"]
[null,"F31","Date and Time Set Request","日期和时间设置请求","H→E","O"]
[null,"F32","Date and Time Set Acknowledge","日期和时间设置确认","H←E","O"]
[null,"F33","Define Report","定义报告","H→E","O"]
[null,"F34","Define Report Acknowledge","定义报告确认","H←E","O"]
[null,"F35","Link Event Report","链接事件报告","H→E","O"]
[null,"F36","Link Event Report Acknowledge","链接事件报告确认","H←E","O"]
[null,"F37","Enable/Disable Event Report","启用/禁用事件报告","H→E","O"]
[null,"F38","Enable/Disable Event Report Acknowledge","启用/禁用事件报告确认","H←E","O"]
[null,"F41","Host Command Send","主机命令发送","H→E","O"]
[null,"F42","Host Command Acknowledge","主机命令确认","H←E","O"]
[null,"F49","Enhanced Remote Command","增强型主机命令发送","H→E","O"]
[null,"F50","Enhanced Remote Command Acknowledge","增强型主机命令确认","H←E","O"]
["S3","F17","Carrier Action Request","载具动作指令请求","H→E","O"]
["S5","F1","EQP Alarm Report Send","EQP 报警报告发送","H←E","O"]
[null,"F2","EQP Alarm  Acknowledge","EQP 报警报告确认","H→E","O"]
[null,"F3","Enable/Disable Alarm Send","启用/禁用警报发送","H→E","O"]
[null,"F4","Enable/Disable Alarm Acknowledge","启用/禁用警报确认","H←E","O"]
[null,"F5","List Alarms Request","列出警报请求","H→E","O"]
[null,"F6","List Alarms Data","列出警报数据","H←E","O"]
[null,"F7","List Enabled Alarm Request","列出启用的警报请求","H→E","O"]
[null,"F8","List Enabled Alarm Data","列出启用的警报数据","H←E","O"]
["S6","F1","Trace Data Send","跟踪数据发送","H←E","×"]
[null,"F2","Trace Data Acknowledge","跟踪数据确认","H→E","×"]
[null,"F3","Process/Measure Data Report","处理/测量数据报告","H←E","×"]
[null,"F4","Process/Measure Data Acknowledge","处理/测量数据确认","H→E","×"]
[null,"F11","Event Report Send","事件报告发送","H←E","O"]
[null,"F12","Event Report Acknowledge","事件报告确认","H→E","O"]
["S7","F3","Process Program Send","处理程序发送","H→E","O"]
[null,"F4","Process Program Acknowledge","处理程序确认","H←E","O"]
[null,"F17","Delete Process Program Send","删除进程程序发送","H→E","×"]
[null,"F18","Delete Process Program Acknowledge","删除处理程序确认","H←E","×"]
[null,"F19","Current EPPD Request","当前 EPPD 请求","H→E","O"]
[null,"F20","Current EPPD Data","当前 EPPD 数据","H←E","O"]
[null,"F23","Formatted Process Program Send","格式化进程程序发送","H←E","×"]
[null,"F24","Formatted Process Program Acknowledge","格式化处理程序确认","H→E","×"]
[null,"F25","Recipe Body Request","配方正文请求","H→E","×"]
[null,"F26","Recipe Body Request Acknowledge","配方主体请求确认","H←E","×"]
["S9","F0","Abort Transaction","中止交易","H←E","O"]
[null,"F1","Unrecognized Device ID","无法识别的设备 ID","H←E","O"]
[null,"F3","Unrecognized Stream Type","无法识别的流类型","H←E","O"]
[null,"F5","Unrecognized Function Type","无法识别的函数类型","H←E","O"]
[null,"F7","Illegal Data","非法数据","H←E","O"]
[null,"F9","Transaction Timer Timeout","事务定时器超时","H←E","O"]
["S10","F3","Terminal Display","终端显示","H→E","O"]
[null,"F4","Terminal Display Acknowledge","终端显示确认","H←E","O"]
["S12","F1","Map SetUp Data Send","Map配置内容发送","H←E","O"]
[null,"F5","Map  Transmit Inquire","请求map传送","H←E","O"]
[null,"F7","Map Data Send Type1","Map内容（Type1）发送","H←E","O"]
[null,"F19","Map Error Report Send","Map错误信息发送","H←E","O"]
["S14","F9","Create Object Request","创建Control Job","H→E","O"]
["S16","F11","PRJobCreateEnh","创建Process Job","H→E","O"]
[null,"F15","PRJobMultiCreateEnh","创建多个Process Job","H→E","O"]
[null,"F27","Control Job Command Request","控制作业命令请求","H→E","O"]

{"sheet":"CEID","index":1,"n_rows":44,"n_cols":4,"rows_kept":44,"merged":[[40,0,40,3]],"flags":["formulas_cached_only"]}
["CEID","CE Name","Descriptions","Attached RPTID"]
[300,"AccessMode_To_Manual ",null,300]
[301,"AccessMode_To_Auto",null,301]
[600,"ControlStateChanged",null,600]
[700,"ProcessStateChanged",null,700]
[10000,"RecipeChanged",null,10000]
[10030,"CarrierArrived",null,10300]
[10031,"CarrierRemoved",null,10300]
[10040,"ReadyToLoad",null,10300]
[10041,"ReadyToUnLoad",null,10300]
[10051,"CarrierIDWaitingForHost",null,10051]
[10052,"CarrierIDVerificationOK",null,10052]
[10053,"CarrierIDVerificationNG",null,10052]
[10061,"SlotMapWaitingForHost",null,10061]
[10062,"SlotMapVerificationOK",null,10062]
[10063,"SlotMapVerificationNG",null,10062]
[10071,"GlassIDReadWaitingForHost",null,10071]
[10072,"GlassIDReadVerificationOK",null,10072]
[10073,"GlassIDReadVerificationNG",null,10072]
[10080,"CarrierStart",null,10080]
[10081,"CarrierCompleted",null,10080]
[10082,"CarrierStopped",null,10080]
[20000,"GlassSlotStart",null,20000]
[20001,"GlassSlotCompleted",null,20000]
[30000,"PrJobPooled",null,30000]
[30001,"PrJobAbort",null,30000]
[30010,"PrJobProcessing",null,30000]
[30011,"PrJobCompleted",null,30000]
[30013,"PrJobPaused",null,30000]
[30014,"PrJobResume",null,30000]
[30020,"PrJobDeleted",null,30000]
[31000,"CJobQueued",null,31000]
[31001,"CJobAbort",null,31000]
[31010,"CJobExecuting",null,31000]
[31020,"CJobCompleted",null,31000]
[31021,"CJobDeleted",null,31000]
[31031,"CJobPaused",null,31000]
[31032,"CJobResume",null,31000]
[40000,"E90_SPSM_NoState_To_NeedsProcessing",null,40000]
[40001,"E90_SPSM_InProcess_To_ProcessCompleted",null,40000]
["Table 5 – CEID (Collection Event ID)"]
[]
[]
[null,null," "]

{"sheet":"ReportID","index":2,"n_rows":18,"n_cols":2,"rows_kept":18,"merged":[[17,0,17,1]],"flags":["formulas_cached_only"]}
["RPTID","VID"]
[300,"1：EquipmentType\n300:AccessMode"]
[301,"1：EquipmentType\n300:AccessMode"]
[600,"500：Clock\n600：CurrentControlState\n601：PreviousControlState"]
[700,"500：Clock\n700：CurrentProcessState\n701：PreviousProcessState"]
[10000,"200：RecipeName\n201：RecipeChangedStr"]
[10300,"1：EquipmentType\n10000：PortID"]
[10051,"1：EquipmentType\n10000：PortID\n10100：CarrierID\n10101：CarrierIDStatus"]
[10061,"1：EquipmentType\n10000：PortID\n10100：CarrierID\n10200：SlotMap"]
[10062,"1：EquipmentType\n10000：PortID\n10100：CarrierID\n10201：SlotMapStatus\n10202：SlotMapStr"]
[10071,"1：EquipmentType\n10000：PortID\n10100：CarrierID\n10203：SlotID\n20000：GlassID"]
[10072,"1：EquipmentType\n10000：PortID\n10100：CarrierID\n10203：SlotID\n20000：GlassID\n20001：GlassIDStatus"]
[10080,"1：EquipmentType\n10000：PortID\n10100：CarrierID"]
[20000,"1：EquipmentType\n10000：PortID\n10203：SlotID"]
[30000,"1：EquipmentType\n30000：PJobID\n30001：PJobState"]
[31000,"1：EquipmentType\n31000：CJobID\n31001：CJobState"]
[40000,"1：EquipmentType\n10203：SlotID\n20000：GlassID"]
["Table 4 – Default Report ID Definition"]

{"sheet":"ECID","index":3,"n_rows":6,"n_cols":4,"rows_kept":6,"merged":[[5,0,5,3]],"flags":["formulas_cached_only"]}
["ECID","EC Name","EC Format","EC Remark"]
[1000,"EFEM_Mdln","A[20]","Equipment name"]
[1001,"EFEM_SoftRev","A[20]","version"]
[2000,"EQ_Mdln","A[20]","Equipment name"]
[2001,"EQ_SoftRev","A[20]","version"]
["Table 1 – Equipment Const ID Definition"]

{"sheet":"DVID","index":4,"n_rows":21,"n_cols":4,"rows_kept":21,"merged":[[20,0,20,3]],"flags":["formulas_cached_only"]}
["DVID","DV Name","DV Format","DV Comment"]
[1,"EquipmentType","A20","EFEM or EQ"]
[200,"RecipeName","A20"]
[201,"RecipeChangedStr","A20"]
[10000,"PortID","U1"]
[10001,"PortState","U1"]
[10100,"CarrierID","A20"]
[10101,"CarrierIDStatus","U1"]
[10200,"SlotMap","LIST","L 16\n     <L\n      <A \"1\"> //SlotID\n      <U1 1> // Presence  3:exist  1:empty\n      >\n     <L\n      <A \"2\">\n      <U1 1>\n     >  \n      ... \n>"]
[10201,"SlotMapStatus","U1"]
[10202,"SlotMapStr","A20"]
[10203,"SlotID","A20"]
[10300,"ContentMap","LIST"]
[20000,"GlassID","A20"]
[30000,"PJobID","A20"]
[30001,"PJobState","U1"]
[30002,"PJobCarrierId","A20"]
[30003,"PJobRecId","A20"]
[31000,"CJobID","A20"]
[31001,"CJobState","U1"]
["Table 2– Data value id definition"]

{"sheet":"SVID","index":5,"n_rows":38,"n_cols":4,"rows_kept":38,"merged":[[37,0,37,3]],"flags":["formulas_cached_only"]}
["SVID","SV Name","SV Format","SV Remark"]
[100,"PortTransferState","U1","0=OutOfService\n1=TransferBlocked\n2=ReadyToLoad\n3=ReadyToUnload\n4=InService\n5=TransferReady"]
[300,"AccessMode","U1","1=Manual\n2=Auto"]
[500,"Clock","A50"]
[600,"CurrentControlState","U1","0:Offline:equipment\n1:Offline-Attempt \n2:Online  \n3:Offline:host   \n4:Online:Local     \n5:Online:Remote"]
[601,"PreviousControlState","U1"]
[700,"CurrentProcessState","U1","0:DOWN\n1:IDLE\n2.SETUP\n3.EXCUTING\n4.MAINTAIN\n5.ALARM"]
[701,"PreviousProcessState","U1"]
[800,"EFEMPPExecName","A20"]
[801,"EQPPExecName","A20"]
[1000,"CJobSpace","U1"]
[2000,"RbRAxisTorque","I2","机器人R轴扭矩"]
[2001,"RbLAxisTorque","l2","机器人L轴扭矩"]
[2002,"RbZAxisTorque","l2","机器人Z轴扭矩"]
[2003,"RbTHAxisTorque","l2","机器人TH轴扭矩"]
[2004,"RbXAxisTorque","l2","机器人X轴扭矩"]
[2005,"AxisX111","l2","X111相机前移栽电机扭矩"]
[2006,"AxisX112","l2","X112相机后移栽电机扭矩"]
[2007,"AxisU113","l2","U113产品旋转电机扭矩"]
[2008,"AxisX114","l2","X114产品左整列电机扭矩"]
[2009,"AxisY121","l2"," Y121产品右整列电机扭矩"]
[2010,"AxisY122","l2","Y122产品前整列电机扭矩"]
[2011,"AxisY123","l2","Y123产品后阵列电机扭矩"]
[2012,"MainAir","U2","总进气压力值"]
[2013,"MainVacuum","l2","总真空压力值"]
[2014,"RbMainVacuum","l2","机器人真空值"]
[2015,"LPMainVacuum","l2","LP真空值#D265"]
[2016,"LPMainAir","U2","LP压空值"]
[2017,"ALVacuum","l2","Aligner真空值"]
[2018,"FFU1RPM","U2","FFU1转速"]
[2019,"FFU2RPM","U2","FFU2转速"]
[2020,"FFU3RPM","U2","FFU3转速"]
[2021,"FFU4RPM","U2","FFU4转速"]
[2022,"ESDValue","I2","静电检测值"]
[2023,"OCREnable","U2","OCR使能：O:开启 1：屏蔽"]
[2024,"CCDEnable","U2","CCD使能：O:开启 1：屏蔽"]
[2025,"FFUParameter","U2","FFU设定值"]
["Table 3 – Status Variable ID definition"]

{"sheet":"Alarm List","index":6,"n_rows":4,"n_cols":3,"rows_kept":4,"merged":[[2,1,2,2]],"flags":["formulas_cached_only"]}
[]
[]
[null,"Alarm List"]
[null,"AlarmID","AlarmInfo"]

{"sheet":"ReadMe","index":7,"n_rows":3,"n_cols":5,"rows_kept":3,"merged":[[0,0,0,4]],"flags":["formulas_cached_only"]}
["CHANGE HISTORY"]
["REV","DATE","DCO #","ORIGINATOR","CHANGE DESCRIPTION"]
["1.0.0","2023-12-10",null,"Xiaolei Wu"," EFEM SECS Manual draft"]