{"text_format":"3","workbook":"xls","n_sheets":3,"sheets":["工艺流程","产品信息","设备信息"],"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"工艺流程","index":0,"n_rows":20,"n_cols":11,"rows_kept":20,"flags":["formulas_cached_only"]}
["G1 FLOW","UNIT",null,null,"G2 FLOW","UNIT",null,null,"G1+G2","UNIT"]
[1,"Port",null,null,101,"Port",null,null,201,"Bonder"]
[null,"↓",{"$nulls":3},"↓",{"$nulls":3},"↓"]
[2,"RB","RB",null,102,"RB","RB",null,202,"RB","RB"]
[null,"↓","↓",null,null,"↓","↓",null,null,"↓","↓"]
[3,"Vac Bake","Port",null,103,"Flip","Port",null,203,"Post Bake","Port"]
[null,"↓",{"$nulls":3},"↓",{"$nulls":3},"↓"]
[4,"RB","RB",null,104,"RB","RB",null,204,"RB","RB"]
[null,"↓","↓",null,null,"↓","↓",null,null,"↓","↓"]
[5,"Align","Port",null,105,"Align","Port",null,205,"Cooling","Port"]
[null,"↓",{"$nulls":3},"↓",{"$nulls":3},"↓"]
[6,"RB","RB",null,106,"RB",null,null,206,"RB","RB"]
[null,"↓","↓",null,null,"↓",{"$nulls":3},"↓","↓"]
[7,"Bonder","Port",null,107,"Bonder","Bonder",null,207,"Measure","Port"]
[{"$nulls":6},"↓",null,null,"↓"]
[8,{"$nulls":3},108,null,"RB",null,208,"RB","RB"]
[{"$nulls":6},"↓",null,null,"↓","↓"]
[9,{"$nulls":3},109,null,"Port",null,209,"Port","Port"]
[]
[10,{"$nulls":3},110,{"$nulls":3},210]

{"sheet":"产品信息","index":1,"n_rows":11,"n_cols":4,"rows_kept":11,"flags":["formulas_cached_only"]}
["NO","SEQ ID","Job Data","FLOW NO"]
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]

{"sheet":"设备信息","index":2,"n_rows":60,"n_cols":7,"rows_kept":60,"flags":["formulas_cached_only"]}
["NO","EQ NO","UNIT","ID","在籍","STATE","EQ MESSAGE"]
[1,1,1,{"$nulls":3},"PORT 1"]
[2,2,1,{"$nulls":3},"PORT 2"]
[3,3,1,{"$nulls":3},"PORT 3"]
[4,4,1,{"$nulls":3},"PORT 4"]
[5,5,1,{"$nulls":3},"RB1"]
[6,6,1,{"$nulls":3},"RB2"]
[7,7,1,{"$nulls":3},"ALIGN"]
[8,8,1,{"$nulls":3},"FLIP"]
[9,9,1,{"$nulls":3},"VAC BAKE"]
[10,9,2,{"$nulls":3},"VAC BAKE"]
[11,10,1,{"$nulls":3},"BONDER1 - G1"]
[12,10,2,{"$nulls":3},"BONDER1 - G2"]
[13,11,1,{"$nulls":3},"BONDER2 - G1"]
[14,11,2,{"$nulls":3},"BONDER2 - G2"]
[15,12,1,{"$nulls":3},"POST BAKE"]
[16,12,2,{"$nulls":3},"POST BAKE"]
[17,12,3,{"$nulls":3},"COOLING"]
[18,12,4,{"$nulls":3},"COOLING"]
[19,13,1,{"$nulls":3},"MEASUREMENT"]
[]
["NO","PORT NO","SLOT","ID","在籍","STATE","EQ MESSAGE"]
[1,1,1,{"$nulls":3},"FOUP"]
[2,null,2]
[3,null,3]
[4,null,4]
[5,null,5]
[6,null,6]
[7,null,7]
[8,null,8]
[]
["NO","PORT NO","SLOT","ID","在籍","STATE","EQ MESSAGE"]
[1,2,1,{"$nulls":3},"FOUP"]
[2,null,2]
[3,null,3]
[4,null,4]
[5,null,5]
[6,null,6]
[7,null,7]
[8,null,8]
[]
["NO","PORT NO","SLOT","ID","在籍","STATE","EQ MESSAGE"]
[1,3,1,{"$nulls":3},"FOUP"]
[2,null,2]
[3,null,3]
[4,null,4]
[5,null,5]
[6,null,6]
[7,null,7]
[8,null,8]
[]
["NO","PORT NO","SLOT","ID","在籍","STATE","EQ MESSAGE"]
[1,4,1,{"$nulls":3},"FOUP"]
[2,null,2]
[3,null,3]
[4,null,4]
[5,null,5]
[6,null,6]
[7,null,7]
[8,null,8]