时间,CEID,事件名称,Port,Glass ID,附加信息
14:12:24.903,3000,Lot 上报,3,C12M0001A,首次进片
14:12:47.008,3030,Slot Map,3,C12M0001A,Slot 状态 U1x8
14:12:47.849,S3F17,ProceedWithCarrier,3,C12M0001A,准备载具信息
14:12:47.865,4022,VID错误上报,-,C12M0001A.1,ERR[UndefinedVID]
14:13:06.204,S16F15,ProcessProgram下载,-,C12M0001A,下载 PJ_C12M0001A_012F
14:13:07.782,S14F9,ControlJob定义,-,C12M0001A,CJ_C12M0001A_012E
14:13:08.204,3040,Job Start,3,C12M0001A,-
14:13:08.282,4011,异常上报,-,C12M0001A.1,ERR[UndefinedVID]
14:13:08.454,10005,报警,-,A1F8A00412.1,EFEM + UndefinedVID
14:54:14.072,3041,Job Finish,3,C12M0001A,加工完成阶段
14:54:14.072,4012,报警/错误,-,C12M0001A.4,ERR[UndefinedVID]
14:54:14.072,2004,Program完成,-,PJ_C12M0001A_012F,Step=4