SVID,SV Name,SV Format,SV Remark
100,PortTransferState,U1,0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady
300,AccessMode,U1,1=Manual\r\n2=Auto
500,Clock,A50,
600,CurrentControlState,U1,0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote
601,PreviousControlState,U1,
700,CurrentProcessState,U1,0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM
701,PreviousProcessState,U1,
800,EFEMPPExecName,A20,
801,EQPPExecName,A20,
2000,RbRAxisTorque,I2,机器人R轴扭矩
2001,RbLAxisTorque,l2,机器人L轴扭矩
2002,RbZAxisTorque,l2,机器人Z轴扭矩
2003,RbTHAxisTorque,l2,机器人TH轴扭矩
2004,RbXAxisTorque,l2,机器人X轴扭矩
2005,AxisX111,l2,X111相机前移栽电机扭矩
2006,AxisX112,l2,X112相机后移栽电机扭矩
2007,AxisU113,l2,U113产品旋转电机扭矩
2008,AxisX114,l2,X114产品左整列电机扭矩
2009,AxisY121,l2,Y121产品右整列电机扭矩
2010,AxisY122,l2,Y122产品前整列电机扭矩
2011,AxisY123,l2,Y123产品后阵列电机扭矩
2012,MainAir,U2,总进气压力值
2013,MainVacuum,l2,总真空压力值
2014,RbMainVacuum,l2,机器人真空值
2015,LPMainVacuum,l2,LP真空值#D265
2016,LPMainAir,U2,LP压空值
2017,ALVacuum,l2,Aligner真空值
2018,FFU1RPM,U2,FFU1转速
2019,FFU2RPM,U2,FFU2转速
2020,FFU3RPM,U2,FFU3转速
2021,FFU4RPM,U2,FFU4转速
2022,ESDValue,I2,静电检测值
2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽"
2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽"
2025,FFUParameter,U2,FFU设定值
5000,CarrierID,A20,卡匣ID
5001,CJobSpace,U1,CJ Space
5002,PJobSpace,U1,PJ Space
5003,PJQueued,L,PJ Queued
5004,PJStartID,A20,PJStartID
5005,PJEndID,A20,PJEndID
5006,PanelStartID,A20,PanelStartID
5007,PanelEndID,A20,PanelEndID
5008,CJStartID,A20,CJStartID
5009,CJEndID,A20,CJEndID