SVID,SV Name,SV Format,SV Remark
100,PortTransferState,U1,0=OutOfService
300,AccessMode,U1,1=Manual
500,Clock,A50,
600,CurrentControlState,U1,0:Offline:equipment
601,PreviousControlState,U1,
700,CurrentProcessState,U1,0:DOWN
701,PreviousProcessState,U1,
800,EFEMPPExecName,A20,
801,EQPPExecName,A20,
2000,RbRAxisTorque,I2,机器人R轴扭矩
2001,RbLAxisTorque,U1,机器人L轴扭矩
2002,RbZAxisTorque,U1,机器人Z轴扭矩
2003,RbTHAxisTorque,U1,机器人TH轴扭矩
2004,RbXAxisTorque,U1,机器人X轴扭矩
2005,AxisX111,U1,X111相机前移栽电机扭矩
2006,AxisX112,U1,X112相机后移栽电机扭矩
2007,AxisU113,U1,U113产品旋转电机扭矩
2008,AxisX114,U1,X114产品左整列电机扭矩
2009,AxisY121,U1,Y121产品右整列电机扭矩
2010,AxisY122,U1,Y122产品前整列电机扭矩
2011,AxisY123,U1,Y123产品后阵列电机扭矩
2012,MainAir,U1,总进气压力值
2013,MainVacuum,U1,总真空压力值
2014,RbMainVacuum,U1,机器人真空值
2015,LPMainVacuum,U1,LP真空值#D265
2016,LPMainAir,U1,LP压空值
2017,ALVacuum,U1,Aligner真空值
2018,FFU1RPM,U1,FFU1转速
2019,FFU2RPM,U1,FFU2转速
2020,FFU3RPM,U1,FFU3转速
2021,FFU4RPM,U1,FFU4转速
2022,ESDValue,I2,静电检测值
2023,OCREnable,U1,"OCR使能：O:开启 1：屏蔽"
2024,CCDEnable,U1,"CCD使能：O:开启 1：屏蔽"
2025,FFUParameter,U1,FFU设定值
5000,CarrierID,A20,卡匣ID
5001,CJobSpace,U1,CJ Space
5002,PJobSpace,U1,PJ Space
5003,PJQueued,L,PJ Queued
5004,PJStartID,A20,PJStartID
5005,PJEndID,A20,PJEndID
5006,PanelStartID,A20,PanelStartID
5007,PanelEndID,A20,PanelEndID
5008,CJStartID,A20,CJStartID
5009,CJEndID,A20,CJEndID
5010,UnloadReadyPortId,U1,"Port ID"
5011,LoadReadyPortId,U1,"Port ID"
5012,BlockedPortId,U1,"Port ID"
5013,TestVID,U1,测试添加变量55
5014,VCRPanelID,A20,Panel id,来自读码器
5015,ReadyToReleasePortId,U1,"Port ID"
5016,LoadPortNotAssocPortId,U1,"Port ID"
5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload string (placeholder)
5018,SubEqpName,A20,Equipment name for EV_SubEqpStart/EV_SubEqpEnd
5019,SubEqpSlot,U1,Slot number for EV_SubEqpStart/EV_SubEqpEnd
5020,PortStateChangePortId,U1,"Port ID for PortStateChange"
5021,PortState,U1,"Port transfer/state code for PortStateChange"
6000,Bonder_SV_ProcessStep,A20,Bonder SV
6001,Bonder_SV_BladderPressure,A20,Bonder SV
6002,Bonder_SV_UpperChamberPressure,A20,Bonder SV
6003,Bonder_SV_PipeVacuumGauge,A20,Bonder SV
6004,Bonder_SV_ChamberVacuumGauge,A20,Bonder SV
6005,Bonder_SV_UpperTemp1,A20,Bonder SV
6006,Bonder_SV_UpperTemp2,A20,Bonder SV
6007,Bonder_SV_UpperTemp3,A20,Bonder SV
6008,Bonder_SV_UpperTemp4,A20,Bonder SV
6009,Bonder_SV_UpperTemp5,A20,Bonder SV
6010,Bonder_SV_UpperTemp6,A20,Bonder SV
6011,Bonder_SV_LowerTemp1,A20,Bonder SV
6012,Bonder_SV_LowerTemp2,A20,Bonder SV
6013,Bonder_SV_LowerTemp3,A20,Bonder SV
6014,Bonder_SV_LowerTemp4,A20,Bonder SV
6015,Bonder_SV_LowerTemp5,A20,Bonder SV
6016,Bonder_SV_LowerTemp6,A20,Bonder SV
6017,Bonder_SV_HeatingRemaining,A20,Bonder SV
6018,Bonder_SV_PressingRemaining,A20,Bonder SV
6100,Bonder_PD_AlignDelay,A20,Bonder ProcessData
6101,Bonder_PD_DwellTime,A20,Bonder ProcessData
6102,Bonder_PD_BreakVacuumDelay,A20,Bonder ProcessData
6103,Bonder_PD_TurboPumpStartDelay,A20,Bonder ProcessData
6104,Bonder_PD_AttachVacuumDelay,A20,Bonder ProcessData
6105,Bonder_PD_HeatingWaitDelay,A20,Bonder ProcessData
6106,Bonder_PD_BladderPressureSet,A20,Bonder ProcessData
6107,Bonder_PD_BladderPressurizeRate,A20,Bonder ProcessData
6108,Bonder_PD_BladderDepressurizeRate,A20,Bonder ProcessData
6109,Bonder_PD_AttachPressureLimit,A20,Bonder ProcessData
6110,Bonder_PD_UpperZTorqueSpeed,A20,Bonder ProcessData
6111,Bonder_PD_UpperTempSet,A20,Bonder ProcessData
6112,Bonder_PD_LowerTempSet,A20,Bonder ProcessData
6113,Bonder_PD_PreAttachSpeed,A20,Bonder ProcessData
6114,Bonder_PD_AttachSpeed,A20,Bonder ProcessData
6115,Bonder_PD_UpperHeatDistance,A20,Bonder ProcessData
6116,Bonder_PD_AttachPressIn,A20,Bonder ProcessData
6117,Bonder_PD_UpperBreakVacuumDist,A20,Bonder ProcessData
6118,Bonder_PD_LowerPinBreakVacuumDist,A20,Bonder ProcessData
6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder ProcessData
6120,Bonder_PD_PumpGaugeSet,A20,Bonder ProcessData
6121,Bonder_PD_TurboReachSet,A20,Bonder ProcessData
10200,SlotMap,U2,SlotMap(Scan)
10201,SlotMapScan,U2,SlotMap(Scan)
10202,SlotMapDownload,U2,SlotMap(Download)