SVID,SV Name,SV Format,SV Remark
10000,CarrierID_P1,A50,Carrier ID for Port 1
10001,CarrierID_P2,A50,Carrier ID for Port 2
10002,CarrierID_P3,A50,Carrier ID for Port 3
10003,CarrierID_P4,A50,Carrier ID for Port 4
100,PortTransferState_P1,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
101,PortTransferState_P2,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
102,PortTransferState_P3,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
103,PortTransferState_P4,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
301,AccessMode_P2,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
302,AccessMode_P3,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
303,AccessMode_P4,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
500,Clock,A50,
600,CurrentControlState,U1,"0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote"
601,PreviousControlState,U1,
700,CurrentProcessState,U1,"0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM"
701,PreviousProcessState,U1,
800,EFEMPPExecName,A20,
801,EQPPExecName,A20,
1000,CJobSpace,U1,
2000,RbRAxisTorque,I2,机器人R轴扭矩
2001,RbLAxisTorque,l2,机器人L轴扭矩
2002,RbZAxisTorque,l2,机器人Z轴扭矩
2003,RbTHAxisTorque,l2,机器人TH轴扭矩
2004,RbXAxisTorque,l2,机器人X轴扭矩
2005,AxisX111,l2,X111相机前移栽电机扭矩
2006,AxisX112,l2,X112相机后移栽电机扭矩
2007,AxisU113,l2,U113产品旋转电机扭矩
2008,AxisX114,l2,X114产品左整列电机扭矩
2009,AxisY121,l2,Y121产品右整列电机扭矩
2010,AxisY122,l2,Y122产品前整列电机扭矩
2011,AxisY123,l2,Y123产品后阵列电机扭矩
2012,MainAir,U2,总进气压力值
2013,MainVacuum,l2,总真空压力值
2014,RbMainVacuum,l2,机器人真空值
2015,LPMainVacuum,l2,LP真空值#D265
2016,LPMainAir,U2,LP压空值
2017,ALVacuum,l2,Aligner真空值
2018,FFU1RPM,U2,FFU1转速
2019,FFU2RPM,U2,FFU2转速
2020,FFU3RPM,U2,FFU3转速
2021,FFU4RPM,U2,FFU4转速
2022,ESDValue,I2,静电检测值
2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽"
2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽"
2025,FFUParameter,U2,FFU设定值