| | |
|---|
| | | SVID,SV Name,SV Format,SV Remark |
|---|
| | | 100,PortTransferState,U1,0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady |
|---|
| | | 300,AccessMode,U1,1=Manual\r\n2=Auto |
|---|
| | | 500,Clock,A50, |
|---|
| | | 600,CurrentControlState,U1,0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote |
|---|
| | | 601,PreviousControlState,U1, |
|---|
| | | 700,CurrentProcessState,U1,0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM |
|---|
| | | 701,PreviousProcessState,U1, |
|---|
| | | 800,EFEMPPExecName,A20, |
|---|
| | | 801,EQPPExecName,A20, |
|---|
| | | 2000,RbRAxisTorque,I2,机器人R轴扭矩 |
|---|
| | | 2001,RbLAxisTorque,l2,机器人L轴扭矩 |
|---|
| | | 2002,RbZAxisTorque,l2,机器人Z轴扭矩 |
|---|
| | | 2003,RbTHAxisTorque,l2,机器人TH轴扭矩 |
|---|
| | | 2004,RbXAxisTorque,l2,机器人X轴扭矩 |
|---|
| | | 2005,AxisX111,l2,X111相机前移栽电机扭矩 |
|---|
| | | 2006,AxisX112,l2,X112相机后移栽电机扭矩 |
|---|
| | | 2007,AxisU113,l2,U113产品旋转电机扭矩 |
|---|
| | | 2008,AxisX114,l2,X114产品左整列电机扭矩 |
|---|
| | | 2009,AxisY121,l2,Y121产品右整列电机扭矩 |
|---|
| | | 2010,AxisY122,l2,Y122产品前整列电机扭矩 |
|---|
| | | 2011,AxisY123,l2,Y123产品后阵列电机扭矩 |
|---|
| | | 2012,MainAir,U2,总进气压力值 |
|---|
| | | 2013,MainVacuum,l2,总真空压力值 |
|---|
| | | 2014,RbMainVacuum,l2,机器人真空值 |
|---|
| | | 2015,LPMainVacuum,l2,LP真空值#D265 |
|---|
| | | 2016,LPMainAir,U2,LP压空值 |
|---|
| | | 2017,ALVacuum,l2,Aligner真空值 |
|---|
| | | 2018,FFU1RPM,U2,FFU1转速 |
|---|
| | | 2019,FFU2RPM,U2,FFU2转速 |
|---|
| | | 2020,FFU3RPM,U2,FFU3转速 |
|---|
| | | 2021,FFU4RPM,U2,FFU4转速 |
|---|
| | | 2022,ESDValue,I2,静电检测值 |
|---|
| | | 2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽" |
|---|
| | | 2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽" |
|---|
| | | 2025,FFUParameter,U2,FFU设定值 |
|---|
| | | 5000,CarrierID,A20,卡匣ID |
|---|
| | | 10000,CarrierID_P1,A50,Carrier ID for Port 1 |
|---|
| | | 10001,CarrierID_P2,A50,Carrier ID for Port 2 |
|---|
| | | 10002,CarrierID_P3,A50,Carrier ID for Port 3 |
|---|
| | | 10003,CarrierID_P4,A50,Carrier ID for Port 4 |
|---|
| | | 100,PortTransferState_P1,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 101,PortTransferState_P2,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 102,PortTransferState_P3,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 103,PortTransferState_P4,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 301,AccessMode_P2,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 302,AccessMode_P3,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 303,AccessMode_P4,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 500,Clock,A50,Current timestamp string |
|---|
| | | 600,CurrentControlState,U1,0=OfflineEquipment;1=OfflineAttempt;2=Online;3=OfflineHost;4=OnlineLocal;5=OnlineRemote |
|---|
| | | 601,PreviousControlState,U1,Previous control state (same code set as CurrentControlState) |
|---|
| | | 700,CurrentProcessState,U1,0=Ready;1=Processing;2=Complete;3=Error |
|---|
| | | 701,PreviousProcessState,U1,Previous process state (0=Ready;1=Processing;2=Complete;3=Error) |
|---|
| | | 800,EFEMPPExecName,A20,Current PPExec name from EFEM |
|---|
| | | 801,EQPPExecName,A20,Current PPExec name from equipment |
|---|
| | | 8100,Bonder1CurrentRecipe,A50,Current recipe for Bonder1 |
|---|
| | | 8101,Bonder2CurrentRecipe,A50,Current recipe for Bonder2 |
|---|
| | | 8102,VacuumBakeCurrentRecipe,A50,Current recipe for VacuumBake |
|---|
| | | 8103,BakeCoolingCurrentRecipe,A50,Current recipe for BakeCooling |
|---|
| | | 8104,MeasurementCurrentRecipe,A50,Current recipe for Measurement |
|---|
| | | 8105,EFEMCurrentRecipe,A50,Current recipe for EFEM |
|---|
| | | 5001,CJobSpace,U1,CJ Space |
|---|
| | | 5002,PJobSpace,U1,PJ Space |
|---|
| | | 5003,PJQueued,L,PJ Queued |
|---|
| | | 5004,PJStartID,A20,PJStartID |
|---|
| | | 5005,PJEndID,A20,PJEndID |
|---|
| | | 5006,PanelStartID,A20,PanelStartID |
|---|
| | | 5007,PanelEndID,A20,PanelEndID |
|---|
| | | 5008,CJStartID,A20,CJStartID |
|---|
| | | 5009,CJEndID,A20,CJEndID |
|---|
| | | 5003,PJQueued,L,PJ queued list (IDs) |
|---|
| | | 5004,PJStartID,A20,PJ start ID |
|---|
| | | 5005,PJEndID,A20,PJ end ID |
|---|
| | | 5006,PanelStartID,A20,Panel start ID |
|---|
| | | 5007,PanelEndID,A20,Panel end ID |
|---|
| | | 5008,CJStartID,A20,CJ start ID |
|---|
| | | 5009,CJEndID,A20,CJ end ID |
|---|
| | | 5014,VCRPanelID,A20,Panel ID from reader |
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload (placeholder) |
|---|
| | | 5018,SubEqpName,A20,Sub equipment name for SubEqp events |
|---|
| | | 5019,SubEqpSlot,U1,Slot number for SubEqp events |
|---|
| | | 5021,PortState,U1,Port transfer/state code for PortStateChange |
|---|
| | | 5022,PortId,U1,Port ID for Port events |
|---|
