| | |
|---|
| | | 600,ControlStateChanged,,(600) |
|---|
| | | 700,ProcessStateChanged,,(700) |
|---|
| | | 10018,ProcessDataReport,,(33) |
|---|
| | | 10015,SubEqpStart,,(10015) |
|---|
| | | 10016,SubEqpEnd,,(10016) |
|---|
| | | 10017,SubEqpStateChange,,(10017) |
|---|
| | | 10000,RecipeChanged,,(10000) |
|---|
| | | 10030,CarrierArrived,,(10300) |
|---|
| | |
|---|
| | | 10061,CheckSlotMap,,(10061) |
|---|
| | | 10062,SlotMapVerificationOK,,(10062) |
|---|
| | | 10063,SlotMapVerificationNG,,(10062) |
|---|
| | | 10064,SlotMapMismatch,Slot map mismatch between scan and download,(10062) |
|---|
| | | 10071,GlassIDReadWaitingForHost,,(10071) |
|---|
| | | 10072,GlassIDReadVerificationOK,,(10072) |
|---|
| | | 10073,GlassIDReadVerificationNG,,(10072) |
|---|
| | |
|---|
| | | 50008,Port_Unload_Ready,,(50008) |
|---|
| | | 50009,Port_Load_Ready,,(50009) |
|---|
| | | 50010,Port_Blocked,,(50010) |
|---|
| | | 50011,OCR_PanelID_Read_OK,扫码事件上报,(50012) |
|---|
| | | 50011,OCR_PanelID_Read_OK,OCR read OK and match,(50012) |
|---|
| | | 50015,OCR_PanelID_Read_NG,OCR read fail (key-in match),(50012) |
|---|
| | | 50016,OCR_PanelID_Read_Mismatch,OCR read OK but mismatch,(50012) |
|---|
| | | 50017,OCR_PanelID_Read_NG_Mismatch,OCR read fail and key-in mismatch,(50012) |
|---|
| | | 50012,Port_Ready_To_Release,,(50013) |
|---|
| | | 50020,PortStateChange,,(50020) |
|---|
| | | 50021,GlassReceivedJob,Glass received into equipment slot,(50021) |
|---|
| | | 50022,GlassSentOutJob,Glass sent out from equipment slot,(50022) |
|---|
| | | 60000,BonderSVData,,(60000) |
|---|
| | | 61000,BonderProcessData,,(61000) |
|---|
| | | 62000,VacuumBakeSVData,,(62000) |
|---|
