| | |
|---|
| | | 6016,Bonder_SV_LowerTemp6,A20,Bonder SV: 下腔温度6 |
|---|
| | | 6017,Bonder_SV_HeatingRemaining,A20,Bonder SV: 加热剩余时间 |
|---|
| | | 6018,Bonder_SV_PressingRemaining,A20,Bonder SV: 压合剩余时间 |
|---|
| | | 6020,Bonder2_SV_ProcessStep,A20,Bonder2 SV: 工艺运行步骤 |
|---|
| | | 6021,Bonder2_SV_BladderPressure,A20,Bonder2 SV: 气囊压力当前 |
|---|
| | | 6022,Bonder2_SV_UpperChamberPressure,A20,Bonder2 SV: 上腔压力合计 |
|---|
| | | 6023,Bonder2_SV_PipeVacuumGauge,A20,Bonder2 SV: 管道真空规值 |
|---|
| | | 6024,Bonder2_SV_ChamberVacuumGauge,A20,Bonder2 SV: 腔体真空规值 |
|---|
| | | 6025,Bonder2_SV_UpperTemp1,A20,Bonder2 SV: 上腔温度1 |
|---|
| | | 6026,Bonder2_SV_UpperTemp2,A20,Bonder2 SV: 上腔温度2 |
|---|
| | | 6027,Bonder2_SV_UpperTemp3,A20,Bonder2 SV: 上腔温度3 |
|---|
| | | 6028,Bonder2_SV_UpperTemp4,A20,Bonder2 SV: 上腔温度4 |
|---|
| | | 6029,Bonder2_SV_UpperTemp5,A20,Bonder2 SV: 上腔温度5 |
|---|
| | | 6030,Bonder2_SV_UpperTemp6,A20,Bonder2 SV: 上腔温度6 |
|---|
| | | 6031,Bonder2_SV_LowerTemp1,A20,Bonder2 SV: 下腔温度1 |
|---|
| | | 6032,Bonder2_SV_LowerTemp2,A20,Bonder2 SV: 下腔温度2 |
|---|
| | | 6033,Bonder2_SV_LowerTemp3,A20,Bonder2 SV: 下腔温度3 |
|---|
| | | 6034,Bonder2_SV_LowerTemp4,A20,Bonder2 SV: 下腔温度4 |
|---|
| | | 6035,Bonder2_SV_LowerTemp5,A20,Bonder2 SV: 下腔温度5 |
|---|
| | | 6036,Bonder2_SV_LowerTemp6,A20,Bonder2 SV: 下腔温度6 |
|---|
| | | 6037,Bonder2_SV_HeatingRemaining,A20,Bonder2 SV: 加热剩余时间 |
|---|
| | | 6038,Bonder2_SV_PressingRemaining,A20,Bonder2 SV: 压合剩余时间 |
|---|
| | | 6100,Bonder_PD_AlignDelay,A20,Bonder PD: 对位延时 |
|---|
| | | 6101,Bonder_PD_DwellTime,A20,Bonder PD: 保压时间 |
|---|
| | | 6102,Bonder_PD_BreakVacuumDelay,A20,Bonder PD: 破真空延时 |
|---|
| | |
|---|
| | | 6701,Measurement_PD_Time,A20,Measurement PD: 时间 |
|---|
| | | 6702,Measurement_PD_Value1,A20,Measurement PD: 测量值1 |
|---|
| | | 6703,Measurement_PD_Value2,A20,Measurement PD: 测量值2 |
|---|
| | | 10200,SlotMap,U2,SlotMap(Scan) |
|---|
| | | 10201,SlotMapScan,U2,SlotMap(Scan) |
|---|
| | | 10202,SlotMapDownload,U2,SlotMap(Download) |
|---|
| | | 10200,SlotMap,U1,SlotMap(Scan) |
|---|
| | | 10201,SlotMapScan,U1,SlotMap(Scan) |
|---|
| | | 10202,SlotMapDownload,U1,SlotMap(Download) |
|---|
