| | |
|---|
| | | SVID,SV Name,SV Format,SV Remark |
|---|
| | | 100,PortTransferState,U1,0=OutOfService |
|---|
| | | 300,AccessMode,U1,1=Manual |
|---|
| | | 500,Clock,A50, |
|---|
| | | 600,CurrentControlState,U1,0:Offline:equipment |
|---|
| | | 601,PreviousControlState,U1, |
|---|
| | | 700,CurrentProcessState,U1,0:DOWN |
|---|
| | | 701,PreviousProcessState,U1, |
|---|
| | | 800,EFEMPPExecName,A20, |
|---|
| | | 801,EQPPExecName,A20, |
|---|
| | | 8100,Bonder1CurrentRecipe,A50, |
|---|
| | | 8101,Bonder2CurrentRecipe,A50, |
|---|
| | | 8102,VacuumBakeCurrentRecipe,A50, |
|---|
| | | 8103,BakeCoolingCurrentRecipe,A50, |
|---|
| | | 8104,MeasurementCurrentRecipe,A50, |
|---|
| | | 8105,EFEMCurrentRecipe,A50, |
|---|
| | | 10000,CarrierID_P1,A50,Carrier ID for Port 1 |
|---|
| | | 10001,CarrierID_P2,A50,Carrier ID for Port 2 |
|---|
| | | 10002,CarrierID_P3,A50,Carrier ID for Port 3 |
|---|
| | | 10003,CarrierID_P4,A50,Carrier ID for Port 4 |
|---|
| | | 100,PortTransferState_P1,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 101,PortTransferState_P2,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 102,PortTransferState_P3,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 103,PortTransferState_P4,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 301,AccessMode_P2,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 302,AccessMode_P3,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 303,AccessMode_P4,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 500,Clock,A50,Current timestamp string |
|---|
| | | 600,CurrentControlState,U1,0=OfflineEquipment;1=OfflineAttempt;2=Online;3=OfflineHost;4=OnlineLocal;5=OnlineRemote |
|---|
| | | 601,PreviousControlState,U1,Previous control state (same code set as CurrentControlState) |
|---|
| | | 700,CurrentProcessState,U1,0=Ready;1=Processing;2=Complete;3=Error |
|---|
| | | 701,PreviousProcessState,U1,Previous process state (0=Ready;1=Processing;2=Complete;3=Error) |
|---|
| | | 800,EFEMPPExecName,A20,Current PPExec name from EFEM |
|---|
| | | 801,EQPPExecName,A20,Current PPExec name from equipment |
|---|
| | | 8100,Bonder1CurrentRecipe,A50,Current recipe for Bonder1 |
|---|
| | | 8101,Bonder2CurrentRecipe,A50,Current recipe for Bonder2 |
|---|
| | | 8102,VacuumBakeCurrentRecipe,A50,Current recipe for VacuumBake |
|---|
| | | 8103,BakeCoolingCurrentRecipe,A50,Current recipe for BakeCooling |
|---|
| | | 8104,MeasurementCurrentRecipe,A50,Current recipe for Measurement |
|---|
| | | 8105,EFEMCurrentRecipe,A50,Current recipe for EFEM |
|---|
| | | 5001,CJobSpace,U1,CJ Space |
|---|
| | | 5002,PJobSpace,U1,PJ Space |
|---|
| | | 5003,PJQueued,L,PJ Queued |
|---|
| | | 5004,PJStartID,A20,PJStartID |
|---|
| | | 5005,PJEndID,A20,PJEndID |
|---|
| | | 5006,PanelStartID,A20,PanelStartID |
|---|
| | | 5007,PanelEndID,A20,PanelEndID |
|---|
| | | 5008,CJStartID,A20,CJStartID |
|---|
| | | 5009,CJEndID,A20,CJEndID |
|---|
| | | 5010,UnloadReadyPortId,U1,Port ID |
|---|
| | | 5011,LoadReadyPortId,U1,Port ID |
|---|
| | | 5012,BlockedPortId,U1,Port ID |
|---|
| | | 5014,VCRPanelID,A20,Panel id, comes from reader |
|---|
| | | 5015,ReadyToReleasePortId,U1,Port ID |
|---|
| | | 5016,LoadPortNotAssocPortId,U1,Port ID |
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload string (placeholder) |
|---|
| | | 5018,SubEqpName,A20,Equipment name for EV_SubEqpStart/EV_SubEqpEnd |
|---|
| | | 5019,SubEqpSlot,U1,Slot number for EV_SubEqpStart/EV_SubEqpEnd |
|---|
| | | 5020,PortStateChangePortId,U1,Port ID for PortStateChange |
|---|
| | | 5003,PJQueued,L,PJ queued list (IDs) |
|---|
| | | 5004,PJStartID,A20,PJ start ID |
|---|
| | | 5005,PJEndID,A20,PJ end ID |
|---|
| | | 5006,PanelStartID,A20,Panel start ID |
|---|
| | | 5007,PanelEndID,A20,Panel end ID |
|---|
| | | 5008,CJStartID,A20,CJ start ID |
|---|
| | | 5009,CJEndID,A20,CJ end ID |
|---|
| | | 5014,VCRPanelID,A20,Panel ID from reader |
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload (placeholder) |
|---|
| | | 5018,SubEqpName,A20,Sub equipment name (SubEqp/Unit/Process/SV/ProcessData events) |
|---|
| | | 5019,SubEqpSlot,U1,Slot number for SubEqp/Unit; 0 when not applicable |
|---|
| | | 5021,PortState,U1,Port transfer/state code for PortStateChange |
|---|
| | | 10200,SlotMap,U2,SlotMap(Scan) |
|---|
| | | 10201,SlotMapScan,U2,SlotMap(Scan) |
|---|
| | | 10202,SlotMapDownload,U2,SlotMap(Download) |
|---|
| | | 5022,PortId,U1,Unified port ID for all Port events |
|---|
| | | 5023,MaterialId,A50,Material/Glass ID for Received/SentOut events |
|---|
