| | |
|---|
| | | 5013,TestVID,U1,测试添加变量55 |
|---|
| | | 5014,VCRPanelID,A20,Panel id,来自读码器 |
|---|
| | | 5015,ReadyToReleasePortId,U1,"Port ID" |
|---|
| | | 5016,LoadPortNotAssocPortId,U1,"Port ID" |
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload string (placeholder) |
|---|
| | | 5018,SubEqpName,A20,Equipment name for EV_SubEqpStart/EV_SubEqpEnd |
|---|
| | | 5019,SubEqpSlot,U1,Slot number for EV_SubEqpStart/EV_SubEqpEnd |
|---|
| | | 5020,PortStateChangePortId,U1,"Port ID for PortStateChange" |
|---|
| | | 5021,PortState,U1,"Port transfer/state code for PortStateChange" |
|---|
| | | 6000,Bonder_SV_ProcessStep,A20,Bonder SV |
|---|
| | | 6001,Bonder_SV_BladderPressure,A20,Bonder SV |
|---|
| | | 6002,Bonder_SV_UpperChamberPressure,A20,Bonder SV |
|---|
| | | 6003,Bonder_SV_PipeVacuumGauge,A20,Bonder SV |
|---|
| | | 6004,Bonder_SV_ChamberVacuumGauge,A20,Bonder SV |
|---|
| | | 6005,Bonder_SV_UpperTemp1,A20,Bonder SV |
|---|
| | | 6006,Bonder_SV_UpperTemp2,A20,Bonder SV |
|---|
| | | 6007,Bonder_SV_UpperTemp3,A20,Bonder SV |
|---|
| | | 6008,Bonder_SV_UpperTemp4,A20,Bonder SV |
|---|
| | | 6009,Bonder_SV_UpperTemp5,A20,Bonder SV |
|---|
| | | 6010,Bonder_SV_UpperTemp6,A20,Bonder SV |
|---|
| | | 6011,Bonder_SV_LowerTemp1,A20,Bonder SV |
|---|
| | | 6012,Bonder_SV_LowerTemp2,A20,Bonder SV |
|---|
| | | 6013,Bonder_SV_LowerTemp3,A20,Bonder SV |
|---|
| | | 6014,Bonder_SV_LowerTemp4,A20,Bonder SV |
|---|
| | | 6015,Bonder_SV_LowerTemp5,A20,Bonder SV |
|---|
| | | 6016,Bonder_SV_LowerTemp6,A20,Bonder SV |
|---|
| | | 6017,Bonder_SV_HeatingRemaining,A20,Bonder SV |
|---|
| | | 6018,Bonder_SV_PressingRemaining,A20,Bonder SV |
|---|
| | | 6100,Bonder_PD_AlignDelay,A20,Bonder ProcessData |
|---|
| | | 6101,Bonder_PD_DwellTime,A20,Bonder ProcessData |
|---|
| | | 6102,Bonder_PD_BreakVacuumDelay,A20,Bonder ProcessData |
|---|
| | | 6103,Bonder_PD_TurboPumpStartDelay,A20,Bonder ProcessData |
|---|
| | | 6104,Bonder_PD_AttachVacuumDelay,A20,Bonder ProcessData |
|---|
| | | 6105,Bonder_PD_HeatingWaitDelay,A20,Bonder ProcessData |
|---|
| | | 6106,Bonder_PD_BladderPressureSet,A20,Bonder ProcessData |
|---|
| | | 6107,Bonder_PD_BladderPressurizeRate,A20,Bonder ProcessData |
|---|
| | | 6108,Bonder_PD_BladderDepressurizeRate,A20,Bonder ProcessData |
|---|
| | | 6109,Bonder_PD_AttachPressureLimit,A20,Bonder ProcessData |
|---|
| | | 6110,Bonder_PD_UpperZTorqueSpeed,A20,Bonder ProcessData |
|---|
| | | 6111,Bonder_PD_UpperTempSet,A20,Bonder ProcessData |
|---|
| | | 6112,Bonder_PD_LowerTempSet,A20,Bonder ProcessData |
|---|
| | | 6113,Bonder_PD_PreAttachSpeed,A20,Bonder ProcessData |
|---|
| | | 6114,Bonder_PD_AttachSpeed,A20,Bonder ProcessData |
|---|
| | | 6115,Bonder_PD_UpperHeatDistance,A20,Bonder ProcessData |
|---|
| | | 6116,Bonder_PD_AttachPressIn,A20,Bonder ProcessData |
|---|
| | | 6117,Bonder_PD_UpperBreakVacuumDist,A20,Bonder ProcessData |
|---|
| | | 6118,Bonder_PD_LowerPinBreakVacuumDist,A20,Bonder ProcessData |
|---|
| | | 6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder ProcessData |
|---|
| | | 6120,Bonder_PD_PumpGaugeSet,A20,Bonder ProcessData |
|---|
| | | 6121,Bonder_PD_TurboReachSet,A20,Bonder ProcessData |
|---|
| | | 6200,VacuumBake_SV_A_ProcessStep,A20,VacuumBake SV |
|---|
| | | 6201,VacuumBake_SV_A_ChamberVacuum,A20,VacuumBake SV |
|---|
| | | 6202,VacuumBake_SV_A_Temp1,A20,VacuumBake SV |
|---|
| | | 6203,VacuumBake_SV_A_Temp2,A20,VacuumBake SV |
|---|
| | | 6204,VacuumBake_SV_A_Temp4,A20,VacuumBake SV |
|---|
| | | 6205,VacuumBake_SV_A_Temp5,A20,VacuumBake SV |
|---|
| | | 6206,VacuumBake_SV_A_Temp6,A20,VacuumBake SV |
|---|
| | | 6207,VacuumBake_SV_A_Temp7,A20,VacuumBake SV |
|---|
| | | 6208,VacuumBake_SV_A_BakeRemaining,A20,VacuumBake SV |
|---|
| | | 6209,VacuumBake_SV_B_ProcessStep,A20,VacuumBake SV |
|---|
| | | 6210,VacuumBake_SV_B_ChamberVacuum,A20,VacuumBake SV |
|---|
| | | 6211,VacuumBake_SV_B_Temp1,A20,VacuumBake SV |
|---|
| | | 6212,VacuumBake_SV_B_Temp2,A20,VacuumBake SV |
|---|
| | | 6213,VacuumBake_SV_B_Temp4,A20,VacuumBake SV |
|---|
| | | 6214,VacuumBake_SV_B_Temp5,A20,VacuumBake SV |
|---|
| | | 6215,VacuumBake_SV_B_Temp6,A20,VacuumBake SV |
|---|
| | | 6216,VacuumBake_SV_B_Temp7,A20,VacuumBake SV |
|---|
| | | 6217,VacuumBake_SV_B_BakeRemaining,A20,VacuumBake SV |
|---|
| | | 6300,VacuumBake_PD_ParamIndex,A20,VacuumBake ProcessData |
|---|
| | | 6301,VacuumBake_PD_HeatTime,A20,VacuumBake ProcessData |
|---|
| | | 6302,VacuumBake_PD_BreakVacuumTime,A20,VacuumBake ProcessData |
|---|
| | | 6303,VacuumBake_PD_VacuumReach,A20,VacuumBake ProcessData |
|---|
| | | 6304,VacuumBake_PD_TempSet,A20,VacuumBake ProcessData |
|---|
| | | 6400,BakeCooling_SV_A_BakeStep,A20,BakeCooling SV |
|---|
| | | 6401,BakeCooling_SV_A_Temp1,A20,BakeCooling SV |
|---|
| | | 6402,BakeCooling_SV_A_Temp2,A20,BakeCooling SV |
|---|
| | | 6403,BakeCooling_SV_A_Temp4,A20,BakeCooling SV |
|---|
| | | 6404,BakeCooling_SV_A_Temp5,A20,BakeCooling SV |
|---|
| | | 6405,BakeCooling_SV_A_Temp6,A20,BakeCooling SV |
|---|
| | | 6406,BakeCooling_SV_A_Temp7,A20,BakeCooling SV |
|---|
| | | 6407,BakeCooling_SV_A_BakeRemaining,A20,BakeCooling SV |
|---|
| | | 6408,BakeCooling_SV_A_CoolStep,A20,BakeCooling SV |
|---|
| | | 6409,BakeCooling_SV_A_CoolRemaining,A20,BakeCooling SV |
|---|
| | | 6410,BakeCooling_SV_B_BakeStep,A20,BakeCooling SV |
|---|
| | | 6411,BakeCooling_SV_B_Temp1,A20,BakeCooling SV |
|---|
| | | 6412,BakeCooling_SV_B_Temp2,A20,BakeCooling SV |
|---|
| | | 6413,BakeCooling_SV_B_Temp4,A20,BakeCooling SV |
|---|
| | | 6414,BakeCooling_SV_B_Temp5,A20,BakeCooling SV |
|---|
| | | 6415,BakeCooling_SV_B_Temp6,A20,BakeCooling SV |
|---|
| | | 6416,BakeCooling_SV_B_Temp7,A20,BakeCooling SV |
|---|
| | | 6417,BakeCooling_SV_B_BakeRemaining,A20,BakeCooling SV |
|---|
| | | 6418,BakeCooling_SV_B_CoolStep,A20,BakeCooling SV |
|---|
| | | 6419,BakeCooling_SV_B_CoolRemaining,A20,BakeCooling SV |
|---|
| | | 6500,BakeCooling_PD_ParamIndex,A20,BakeCooling ProcessData |
|---|
| | | 6501,BakeCooling_PD_TimeOrTemp1,A20,BakeCooling ProcessData |
|---|
| | | 6502,BakeCooling_PD_TimeOrTemp2,A20,BakeCooling ProcessData |
|---|
| | | 6503,BakeCooling_PD_Reserved,A20,BakeCooling ProcessData |
|---|
| | | 6600,Measurement_SV_ProcessStep,A20,Measurement SV |
|---|
| | | 6601,Measurement_SV_AOIScore,A20,Measurement SV |
|---|
| | | 6700,Measurement_PD_ParamIndex,A20,Measurement ProcessData |
|---|
| | | 6701,Measurement_PD_Time,A20,Measurement ProcessData |
|---|
| | | 6702,Measurement_PD_Value1,A20,Measurement ProcessData |
|---|
| | | 6703,Measurement_PD_Value2,A20,Measurement ProcessData |
|---|
| | | 10200,SlotMap,U2,SlotMap(Scan) |
|---|
| | | 10201,SlotMapScan,U2,SlotMap(Scan) |
|---|
| | | 10202,SlotMapDownload,U2,SlotMap(Download) |
|---|
