| | |
|---|
| | | 6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder ProcessData |
|---|
| | | 6120,Bonder_PD_PumpGaugeSet,A20,Bonder ProcessData |
|---|
| | | 6121,Bonder_PD_TurboReachSet,A20,Bonder ProcessData |
|---|
| | | 6200,VacuumBake_SV_A_ProcessStep,A20,VacuumBake SV |
|---|
| | | 6201,VacuumBake_SV_A_ChamberVacuum,A20,VacuumBake SV |
|---|
| | | 6202,VacuumBake_SV_A_Temp1,A20,VacuumBake SV |
|---|
| | | 6203,VacuumBake_SV_A_Temp2,A20,VacuumBake SV |
|---|
| | | 6204,VacuumBake_SV_A_Temp4,A20,VacuumBake SV |
|---|
| | | 6205,VacuumBake_SV_A_Temp5,A20,VacuumBake SV |
|---|
| | | 6206,VacuumBake_SV_A_Temp6,A20,VacuumBake SV |
|---|
| | | 6207,VacuumBake_SV_A_Temp7,A20,VacuumBake SV |
|---|
| | | 6208,VacuumBake_SV_A_BakeRemaining,A20,VacuumBake SV |
|---|
| | | 6209,VacuumBake_SV_B_ProcessStep,A20,VacuumBake SV |
|---|
| | | 6210,VacuumBake_SV_B_ChamberVacuum,A20,VacuumBake SV |
|---|
| | | 6211,VacuumBake_SV_B_Temp1,A20,VacuumBake SV |
|---|
| | | 6212,VacuumBake_SV_B_Temp2,A20,VacuumBake SV |
|---|
| | | 6213,VacuumBake_SV_B_Temp4,A20,VacuumBake SV |
|---|
| | | 6214,VacuumBake_SV_B_Temp5,A20,VacuumBake SV |
|---|
| | | 6215,VacuumBake_SV_B_Temp6,A20,VacuumBake SV |
|---|
| | | 6216,VacuumBake_SV_B_Temp7,A20,VacuumBake SV |
|---|
| | | 6217,VacuumBake_SV_B_BakeRemaining,A20,VacuumBake SV |
|---|
| | | 6300,VacuumBake_PD_ParamIndex,A20,VacuumBake ProcessData |
|---|
| | | 6301,VacuumBake_PD_HeatTime,A20,VacuumBake ProcessData |
|---|
| | | 6302,VacuumBake_PD_BreakVacuumTime,A20,VacuumBake ProcessData |
|---|
| | | 6303,VacuumBake_PD_VacuumReach,A20,VacuumBake ProcessData |
|---|
| | | 6304,VacuumBake_PD_TempSet,A20,VacuumBake ProcessData |
|---|
| | | 6400,BakeCooling_SV_A_BakeStep,A20,BakeCooling SV |
|---|
| | | 6401,BakeCooling_SV_A_Temp1,A20,BakeCooling SV |
|---|
| | | 6402,BakeCooling_SV_A_Temp2,A20,BakeCooling SV |
|---|
| | | 6403,BakeCooling_SV_A_Temp4,A20,BakeCooling SV |
|---|
| | | 6404,BakeCooling_SV_A_Temp5,A20,BakeCooling SV |
|---|
| | | 6405,BakeCooling_SV_A_Temp6,A20,BakeCooling SV |
|---|
| | | 6406,BakeCooling_SV_A_Temp7,A20,BakeCooling SV |
|---|
| | | 6407,BakeCooling_SV_A_BakeRemaining,A20,BakeCooling SV |
|---|
| | | 6408,BakeCooling_SV_A_CoolStep,A20,BakeCooling SV |
|---|
| | | 6409,BakeCooling_SV_A_CoolRemaining,A20,BakeCooling SV |
|---|
| | | 6410,BakeCooling_SV_B_BakeStep,A20,BakeCooling SV |
|---|
| | | 6411,BakeCooling_SV_B_Temp1,A20,BakeCooling SV |
|---|
| | | 6412,BakeCooling_SV_B_Temp2,A20,BakeCooling SV |
|---|
| | | 6413,BakeCooling_SV_B_Temp4,A20,BakeCooling SV |
|---|
| | | 6414,BakeCooling_SV_B_Temp5,A20,BakeCooling SV |
|---|
| | | 6415,BakeCooling_SV_B_Temp6,A20,BakeCooling SV |
|---|
| | | 6416,BakeCooling_SV_B_Temp7,A20,BakeCooling SV |
|---|
| | | 6417,BakeCooling_SV_B_BakeRemaining,A20,BakeCooling SV |
|---|
| | | 6418,BakeCooling_SV_B_CoolStep,A20,BakeCooling SV |
|---|
| | | 6419,BakeCooling_SV_B_CoolRemaining,A20,BakeCooling SV |
|---|
| | | 6500,BakeCooling_PD_ParamIndex,A20,BakeCooling ProcessData |
|---|
| | | 6501,BakeCooling_PD_TimeOrTemp1,A20,BakeCooling ProcessData |
|---|
| | | 6502,BakeCooling_PD_TimeOrTemp2,A20,BakeCooling ProcessData |
|---|
| | | 6503,BakeCooling_PD_Reserved,A20,BakeCooling ProcessData |
|---|
| | | 6600,Measurement_SV_ProcessStep,A20,Measurement SV |
|---|
| | | 6601,Measurement_SV_AOIScore,A20,Measurement SV |
|---|
| | | 6700,Measurement_PD_ParamIndex,A20,Measurement ProcessData |
|---|
| | | 6701,Measurement_PD_Time,A20,Measurement ProcessData |
|---|
| | | 6702,Measurement_PD_Value1,A20,Measurement ProcessData |
|---|
| | | 6703,Measurement_PD_Value2,A20,Measurement ProcessData |
|---|
| | | 10200,SlotMap,U2,SlotMap(Scan) |
|---|
| | | 10201,SlotMapScan,U2,SlotMap(Scan) |
|---|
| | | 10202,SlotMapDownload,U2,SlotMap(Download) |
|---|
