| | |
|---|
| | | SVID,SV Name,SV Format,SV Remark |
|---|
| | | 100,PortTransferState,U1,"0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady" |
|---|
| | | 300,AccessMode,U1,"1=Manual\r\n2=Auto" |
|---|
| | | 100,PortTransferState,U1,0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady |
|---|
| | | 300,AccessMode,U1,1=Manual\r\n2=Auto |
|---|
| | | 500,Clock,A50, |
|---|
| | | 600,CurrentControlState,U1,"0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote" |
|---|
| | | 600,CurrentControlState,U1,0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote |
|---|
| | | 601,PreviousControlState,U1, |
|---|
| | | 700,CurrentProcessState,U1,"0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM" |
|---|
| | | 700,CurrentProcessState,U1,0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM |
|---|
| | | 701,PreviousProcessState,U1, |
|---|
| | | 800,EFEMPPExecName,A20, |
|---|
| | | 801,EQPPExecName,A20, |
|---|
| | | 1000,CJobSpace,U1, |
|---|
| | | 2000,RbRAxisTorque,I2,机器人R轴扭矩 |
|---|
| | | 2001,RbLAxisTorque,l2,机器人L轴扭矩 |
|---|
| | | 2002,RbZAxisTorque,l2,机器人Z轴扭矩 |
|---|
| | | 2003,RbTHAxisTorque,l2,机器人TH轴扭矩 |
|---|
| | | 2004,RbXAxisTorque,l2,机器人X轴扭矩 |
|---|
| | | 2005,AxisX111,l2,X111相机前移栽电机扭矩 |
|---|
| | | 2006,AxisX112,l2,X112相机后移栽电机扭矩 |
|---|
| | | 2007,AxisU113,l2,U113产品旋转电机扭矩 |
|---|
| | | 2008,AxisX114,l2,X114产品左整列电机扭矩 |
|---|
| | | 2009,AxisY121,l2,Y121产品右整列电机扭矩 |
|---|
| | | 2010,AxisY122,l2,Y122产品前整列电机扭矩 |
|---|
| | | 2011,AxisY123,l2,Y123产品后阵列电机扭矩 |
|---|
| | | 2012,MainAir,U2,总进气压力值 |
|---|
| | | 2013,MainVacuum,l2,总真空压力值 |
|---|
| | | 2014,RbMainVacuum,l2,机器人真空值 |
|---|
| | | 2015,LPMainVacuum,l2,LP真空值#D265 |
|---|
| | | 2016,LPMainAir,U2,LP压空值 |
|---|
| | | 2017,ALVacuum,l2,Aligner真空值 |
|---|
| | | 2018,FFU1RPM,U2,FFU1转速 |
|---|
| | | 2019,FFU2RPM,U2,FFU2转速 |
|---|
| | | 2020,FFU3RPM,U2,FFU3转速 |
|---|
| | | 2021,FFU4RPM,U2,FFU4转速 |
|---|
| | | 2022,ESDValue,I2,静电检测值 |
|---|
| | | 2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽" |
|---|
| | | 2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽" |
|---|
| | | 2025,FFUParameter,U2,FFU设定值 |
|---|
| | | 2000,RbRAxisTorque,I2,机器人R轴扭矩 |
|---|
| | | 2001,RbLAxisTorque,l2,机器人L轴扭矩 |
|---|
| | | 2002,RbZAxisTorque,l2,机器人Z轴扭矩 |
|---|
| | | 2003,RbTHAxisTorque,l2,机器人TH轴扭矩 |
|---|
| | | 2004,RbXAxisTorque,l2,机器人X轴扭矩 |
|---|
| | | 2005,AxisX111,l2,X111相机前移栽电机扭矩 |
|---|
| | | 2006,AxisX112,l2,X112相机后移栽电机扭矩 |
|---|
| | | 2007,AxisU113,l2,U113产品旋转电机扭矩 |
|---|
| | | 2008,AxisX114,l2,X114产品左整列电机扭矩 |
|---|
| | | 2009,AxisY121,l2,Y121产品右整列电机扭矩 |
|---|
| | | 2010,AxisY122,l2,Y122产品前整列电机扭矩 |
|---|
| | | 2011,AxisY123,l2,Y123产品后阵列电机扭矩 |
|---|
| | | 2012,MainAir,U2,总进气压力值 |
|---|
| | | 2013,MainVacuum,l2,总真空压力值 |
|---|
| | | 2014,RbMainVacuum,l2,机器人真空值 |
|---|
| | | 2015,LPMainVacuum,l2,LP真空值#D265 |
|---|
| | | 2016,LPMainAir,U2,LP压空值 |
|---|
| | | 2017,ALVacuum,l2,Aligner真空值 |
|---|
| | | 2018,FFU1RPM,U2,FFU1转速 |
|---|
| | | 2019,FFU2RPM,U2,FFU2转速 |
|---|
| | | 2020,FFU3RPM,U2,FFU3转速 |
|---|
| | | 2021,FFU4RPM,U2,FFU4转速 |
|---|
| | | 2022,ESDValue,I2,静电检测值 |
|---|
| | | 2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽" |
|---|
| | | 2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽" |
|---|
| | | 2025,FFUParameter,U2,FFU设定值 |
|---|
| | | 5000,CarrierID,A20,卡匣ID |
|---|
| | | 5001,CJobSpace,U1,CJ Space |
|---|
| | | 5002,PJobSpace,U1,PJ Space |
|---|
