| | |
|---|
| | | 10061,CheckSlotMap,,(10061) |
|---|
| | | 10062,SlotMapVerificationOK,,(10062) |
|---|
| | | 10063,SlotMapVerificationNG,,(10062) |
|---|
| | | 10064,SlotMapMismatch,,(10062) |
|---|
| | | 10071,GlassIDReadWaitingForHost,,(10071) |
|---|
| | | 10072,GlassIDReadVerificationOK,,(10072) |
|---|
| | | 10073,GlassIDReadVerificationNG,,(10072) |
|---|
| | |
|---|
| | | 50020,PortStateChange,,(50020) |
|---|
| | | 60000,BonderSVData,,(60000) |
|---|
| | | 61000,BonderProcessData,,(61000) |
|---|
| | | 62000,VacuumBakeSVData,,(62000) |
|---|
| | | 63000,VacuumBakeProcessData,,(63000) |
|---|
| | | 64000,BakeCoolingSVData,,(64000) |
|---|
| | | 65000,BakeCoolingProcessData,,(65000) |
|---|
| | | 66000,MeasurementSVData,,(66000) |
|---|
| | | 67000,MeasurementProcessData,,(67000) |
|---|
| | | 12000,UnitStart,,(12000) |
|---|
| | | 12001,UnitStateChange,,(12001) |
|---|
| | | 12002,UnitEnd,,(12002) |
|---|
