| | |
|---|
| | | 301,AccessMode_To_Auto,,(301) |
|---|
| | | 600,ControlStateChanged,,(600) |
|---|
| | | 700,ProcessStateChanged,,(700) |
|---|
| | | 10018,ProcessDataReport,,(33) |
|---|
| | | 10015,SubEqpStart,,(10015) |
|---|
| | | 10016,SubEqpEnd,,(10016) |
|---|
| | | 10000,RecipeChanged,,(10000) |
|---|
| | | 10030,CarrierArrived,,(10300) |
|---|
| | | 10031,CarrierRemoved,,(10300) |
|---|
| | | 10032,LoadPortNotAssoc,,(50014) |
|---|
| | | 10040,ReadyToLoad,,(10300) |
|---|
| | | 10041,ReadyToUnLoad,,(10300) |
|---|
| | | 10051,CarrierIDWaitingForHost,,(10051) |
|---|
| | | 10052,CarrierIDVerificationOK,,(10052) |
|---|
| | | 10053,CarrierIDVerificationNG,,(10052) |
|---|
| | | 10061,SlotMapWaitingForHost,,(10061) |
|---|
| | | 10061,CheckSlotMap,,(10061) |
|---|
| | | 10062,SlotMapVerificationOK,,(10062) |
|---|
| | | 10063,SlotMapVerificationNG,,(10062) |
|---|
| | | 10071,GlassIDReadWaitingForHost,,(10071) |
|---|
