| | |
| | | 10061,CheckSlotMap,,(10061) |
| | | 10062,SlotMapVerificationOK,,(10062) |
| | | 10063,SlotMapVerificationNG,,(10062) |
| | | 10064,SlotMapMismatch,,(10062) |
| | | 10064,SlotMapMismatch,Slot map mismatch between scan and download,(10062) |
| | | 10071,GlassIDReadWaitingForHost,,(10071) |
| | | 10072,GlassIDReadVerificationOK,,(10072) |
| | | 10073,GlassIDReadVerificationNG,,(10072) |
| | |
| | | 50008,Port_Unload_Ready,,(50008) |
| | | 50009,Port_Load_Ready,,(50009) |
| | | 50010,Port_Blocked,,(50010) |
| | | 50011,OCR_PanelID_Read_OK,,(50012) |
| | | 50015,OCR_PanelID_Read_NG,,(50012) |
| | | 50016,OCR_PanelID_Read_Mismatch,,(50012) |
| | | 50017,OCR_PanelID_Read_NG_Mismatch,,(50012) |
| | | 50011,OCR_PanelID_Read_OK,OCR read OK and match,(50012) |
| | | 50015,OCR_PanelID_Read_NG,OCR read fail (key-in match),(50012) |
| | | 50016,OCR_PanelID_Read_Mismatch,OCR read OK but mismatch,(50012) |
| | | 50017,OCR_PanelID_Read_NG_Mismatch,OCR read fail and key-in mismatch,(50012) |
| | | 50012,Port_Ready_To_Release,,(50013) |
| | | 50020,PortStateChange,,(50020) |
| | | 50021,GlassReceivedJob,Glass received into equipment slot,(50021) |
| | | 50022,GlassSentOutJob,Glass sent out from equipment slot,(50022) |
| | | 60000,BonderSVData,,(60000) |
| | | 61000,BonderProcessData,,(61000) |
| | | 62000,VacuumBakeSVData,,(62000) |