| | |
|---|
| | | SVID,SV Name,SV Format,SV Remark |
|---|
| | | 10000,CarrierID_P1,A50,Carrier ID for Port 1 |
|---|
| | | 10001,CarrierID_P2,A50,Carrier ID for Port 2 |
|---|
| | | 10002,CarrierID_P3,A50,Carrier ID for Port 3 |
|---|
| | | 10003,CarrierID_P4,A50,Carrier ID for Port 4 |
|---|
| | | 100,PortTransferState_P1,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 101,PortTransferState_P2,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 102,PortTransferState_P3,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 103,PortTransferState_P4,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked |
|---|
| | | 300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 301,AccessMode_P2,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 302,AccessMode_P3,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 303,AccessMode_P4,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady |
|---|
| | | 500,Clock,A50,Current timestamp string |
|---|
| | | 600,CurrentControlState,U1,0=OfflineEquipment;1=OfflineAttempt;2=Online;3=OfflineHost;4=OnlineLocal;5=OnlineRemote |
|---|
| | | 601,PreviousControlState,U1,Previous control state (same code set as CurrentControlState) |
|---|
| | | 700,CurrentProcessState,U1,0=Ready;1=Processing;2=Complete;3=Error |
|---|
| | | 701,PreviousProcessState,U1,Previous process state (0=Ready;1=Processing;2=Complete;3=Error) |
|---|
| | | 800,EFEMPPExecName,A20,Current PPExec name from EFEM |
|---|
| | | 801,EQPPExecName,A20,Current PPExec name from equipment |
|---|
| | | 8100,Bonder1CurrentRecipe,A50,Current recipe for Bonder1 |
|---|
| | | 8101,Bonder2CurrentRecipe,A50,Current recipe for Bonder2 |
|---|
| | | 8102,VacuumBakeCurrentRecipe,A50,Current recipe for VacuumBake |
|---|
| | | 8103,BakeCoolingCurrentRecipe,A50,Current recipe for BakeCooling |
|---|
| | | 8104,MeasurementCurrentRecipe,A50,Current recipe for Measurement |
|---|
| | | 8105,EFEMCurrentRecipe,A50,Current recipe for EFEM |
|---|
| | | 5001,CJobSpace,U1,CJ Space |
|---|
| | | 5002,PJobSpace,U1,PJ Space |
|---|
| | | 5003,PJQueued,L,PJ queued list (IDs) |
|---|
| | | 5004,PJStartID,A20,PJ start ID |
|---|
| | | 5005,PJEndID,A20,PJ end ID |
|---|
| | | 5006,PanelStartID,A20,Panel start ID |
|---|
| | | 5007,PanelEndID,A20,Panel end ID |
|---|
| | | 5008,CJStartID,A20,CJ start ID |
|---|
| | | 5009,CJEndID,A20,CJ end ID |
|---|
| | | 5014,VCRPanelID,A20,Panel ID from reader |
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload (placeholder) |
|---|
| | | 5018,SubEqpName,A20,Sub equipment name (SubEqp/Unit/Process/SV/ProcessData events) |
|---|
| | | 5019,SubEqpSlot,U1,Slot number for SubEqp/Unit; 0 when not applicable |
|---|
| | | 5021,PortState,U1,Port transfer/state code for PortStateChange |
|---|
| | | 5022,PortId,U1,Unified port ID for all Port events |
|---|
| | | 5023,MaterialId,A50,Material/Glass ID for Received/SentOut events |
|---|
| | | SVID,SV Name,SV Format,SV Remark
|
|---|
| | | 300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
|
|---|
| | | 500,Clock,A50,Current timestamp string
|
|---|
| | | 600,CurrentControlState,U1,0=OfflineEquipment;1=OfflineAttempt;2=Online;3=OfflineHost;4=OnlineLocal;5=OnlineRemote
|
|---|
| | | 601,PreviousControlState,U1,Previous control state (same code set as CurrentControlState)
|
|---|
| | | 700,CurrentProcessState,U1,0=Ready;1=Processing;2=Complete;3=Error
|
|---|
| | | 701,PreviousProcessState,U1,Previous process state (0=Ready;1=Processing;2=Complete;3=Error)
|
|---|
| | | 801,EQPPExecName,A20,Current PPExec name from equipment
|
|---|
| | | 5001,CJobSpace,U1,CJ Space
|
|---|
| | | 5002,PJobSpace,U1,PJ Space
|
|---|
| | | 5003,PJQueued,L,PJ queued list (IDs)
|
|---|
| | | 5004,PJID,A20,Process job ID (PJ)
|
|---|
| | | 5006,PanelStartID,A20,Panel start ID
|
|---|
| | | 5007,PanelEndID,A20,Panel end ID
|
|---|
| | | 5008,CJID,A20,Control job ID (CJ)
|
|---|
| | | 5014,VCRPanelID,A20,Panel ID from reader
|
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload (placeholder)
|
|---|
| | | 5018,SubEqpName,A20,Sub equipment name (SubEqp/Unit/Process/SV/ProcessData events)
|
|---|
| | | 5019,SubEqpSlot,U1,Slot number for SubEqp/Unit; 0 when not applicable
|
|---|
| | | 5021,PortState,U1,Port transfer/state code for PortStateChange
|
|---|
| | | 5022,PortId,U1,Unified port ID for all Port events
|
|---|
| | | 5024,EquipmentStatus,U1,Equipment status (SubEqpStateChange): 1=PM;2=Down(BM);3=Pause;4=Idle;5=Run;6=Job Change;7=ETC
|
|---|
| | | 5025,TargetCarrier,A50,Target carrier ID for SentOutJob
|
|---|
| | | 5026,TargetSlot,U1,Target slot number for SentOutJob
|
|---|
| | | 5027,TargetPanelID,A50,Target panel/glass ID for SentOutJob
|
|---|
| | | 5028,SourceCarrier,A50,Source carrier ID for ReceivedJob
|
|---|
| | | 5029,SourceSlot,U1,Source slot number for ReceivedJob
|
|---|
| | | 5030,SourcePanelID,A50,Source panel/glass ID for ReceivedJob
|
|---|
| | | 8100,Bonder1CurrentRecipe,A50,Current recipe for Bonder1
|
|---|
| | | 8101,Bonder2CurrentRecipe,A50,Current recipe for Bonder2
|
|---|
| | | 8102,VacuumBakeCurrentRecipe,A50,Current recipe for VacuumBake
|
|---|
| | | 8103,BakeCoolingCurrentRecipe,A50,Current recipe for BakeCooling
|
|---|
| | | 8104,MeasurementCurrentRecipe,A50,Current recipe for Measurement
|
|---|
| | | 8105,EFEMCurrentRecipe,A50,Current recipe for EFEM
|
|---|
| | | 10000,CarrierID_P1,A50,Carrier ID for Port 1
|
|---|
| | | 10001,CarrierID_P2,A50,Carrier ID for Port 2
|
|---|
| | | 10002,CarrierID_P3,A50,Carrier ID for Port 3
|
|---|
| | | 10003,CarrierID_P4,A50,Carrier ID for Port 4
|
|---|
