| | |
|---|
| | | SVID,SV Name,SV Format,SV Remark |
|---|
| | | 100,PortTransferState,U1,"0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady" |
|---|
| | | 300,AccessMode,U1,"1=Manual\r\n2=Auto" |
|---|
| | | 500,Clock,A50, |
|---|
| | | 600,CurrentControlState,U1,"0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote" |
|---|
| | | 601,PreviousControlState,U1, |
|---|
| | | 700,CurrentProcessState,U1,"0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM" |
|---|
| | | 701,PreviousProcessState,U1, |
|---|
| | | 800,EFEMPPExecName,A20, |
|---|
| | | 801,EQPPExecName,A20, |
|---|
| | | 1000,CJobSpace,U1, |
|---|
| | | 2000,RbRAxisTorque,I2,机器人R轴扭矩 |
|---|
| | | 2001,RbLAxisTorque,l2,机器人L轴扭矩 |
|---|
| | | 2002,RbZAxisTorque,l2,机器人Z轴扭矩 |
|---|
| | | 2003,RbTHAxisTorque,l2,机器人TH轴扭矩 |
|---|
| | | 2004,RbXAxisTorque,l2,机器人X轴扭矩 |
|---|
| | | 2005,AxisX111,l2,X111相机前移栽电机扭矩 |
|---|
| | | 2006,AxisX112,l2,X112相机后移栽电机扭矩 |
|---|
| | | 2007,AxisU113,l2,U113产品旋转电机扭矩 |
|---|
| | | 2008,AxisX114,l2,X114产品左整列电机扭矩 |
|---|
| | | 2009,AxisY121,l2,Y121产品右整列电机扭矩 |
|---|
| | | 2010,AxisY122,l2,Y122产品前整列电机扭矩 |
|---|
| | | 2011,AxisY123,l2,Y123产品后阵列电机扭矩 |
|---|
| | | 2012,MainAir,U2,总进气压力值 |
|---|
| | | 2013,MainVacuum,l2,总真空压力值 |
|---|
| | | 2014,RbMainVacuum,l2,机器人真空值 |
|---|
| | | 2015,LPMainVacuum,l2,LP真空值#D265 |
|---|
| | | 2016,LPMainAir,U2,LP压空值 |
|---|
| | | 2017,ALVacuum,l2,Aligner真空值 |
|---|
| | | 2018,FFU1RPM,U2,FFU1转速 |
|---|
| | | 2019,FFU2RPM,U2,FFU2转速 |
|---|
| | | 2020,FFU3RPM,U2,FFU3转速 |
|---|
| | | 2021,FFU4RPM,U2,FFU4转速 |
|---|
| | | 2022,ESDValue,I2,静电检测值 |
|---|
| | | 2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽" |
|---|
| | | 2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽" |
|---|
| | | 2025,FFUParameter,U2,FFU设定值 |
|---|
| | | SVID,SV Name,SV Format,SV Remark
|
|---|
| | | 300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
|
|---|
| | | 500,Clock,A50,Current timestamp string
|
|---|
| | | 600,CurrentControlState,U1,0=OfflineEquipment;1=OfflineAttempt;2=Online;3=OfflineHost;4=OnlineLocal;5=OnlineRemote
|
|---|
| | | 601,PreviousControlState,U1,Previous control state (same code set as CurrentControlState)
|
|---|
| | | 700,CurrentProcessState,U1,0=Ready;1=Processing;2=Complete;3=Error
|
|---|
| | | 701,PreviousProcessState,U1,Previous process state (0=Ready;1=Processing;2=Complete;3=Error)
|
|---|
| | | 801,EQPPExecName,A20,Current PPExec name from equipment
|
|---|
| | | 5001,CJobSpace,U1,CJ Space
|
|---|
| | | 5002,PJobSpace,U1,PJ Space
|
|---|
| | | 5003,PJQueued,L,PJ queued list (IDs)
|
|---|
| | | 5004,PJID,A20,Process job ID (PJ)
|
|---|
| | | 5006,PanelStartID,A20,Panel start ID
|
|---|
| | | 5007,PanelEndID,A20,Panel end ID
|
|---|
| | | 5008,CJID,A20,Control job ID (CJ)
|
|---|
| | | 5014,VCRPanelID,A20,Panel ID from reader
|
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload (placeholder)
|
|---|
| | | 5018,SubEqpName,A20,Sub equipment name (SubEqp/Unit/Process/SV/ProcessData events)
|
|---|
| | | 5019,SubEqpSlot,U1,Slot number for SubEqp/Unit; 0 when not applicable
|
|---|
| | | 5021,PortState,U1,Port transfer/state code for PortStateChange
|
|---|
| | | 5022,PortId,U1,Unified port ID for all Port events
|
|---|
| | | 5024,EquipmentStatus,U1,Equipment status (SubEqpStateChange): 1=PM;2=Down(BM);3=Pause;4=Idle;5=Run;6=Job Change;7=ETC
|
|---|
| | | 5025,TargetCarrier,A50,Target carrier ID for SentOutJob
|
|---|
| | | 5026,TargetSlot,U1,Target slot number for SentOutJob
|
|---|
| | | 5027,TargetPanelID,A50,Target panel/glass ID for SentOutJob
|
|---|
| | | 5028,SourceCarrier,A50,Source carrier ID for ReceivedJob
|
|---|
| | | 5029,SourceSlot,U1,Source slot number for ReceivedJob
|
|---|
| | | 5030,SourcePanelID,A50,Source panel/glass ID for ReceivedJob
|
|---|
| | | 8100,Bonder1CurrentRecipe,A50,Current recipe for Bonder1
|
|---|
| | | 8101,Bonder2CurrentRecipe,A50,Current recipe for Bonder2
|
|---|
| | | 8102,VacuumBakeCurrentRecipe,A50,Current recipe for VacuumBake
|
|---|
| | | 8103,BakeCoolingCurrentRecipe,A50,Current recipe for BakeCooling
|
|---|
| | | 8104,MeasurementCurrentRecipe,A50,Current recipe for Measurement
|
|---|
| | | 8105,EFEMCurrentRecipe,A50,Current recipe for EFEM
|
|---|
| | | 10000,CarrierID_P1,A50,Carrier ID for Port 1
|
|---|
| | | 10001,CarrierID_P2,A50,Carrier ID for Port 2
|
|---|
| | | 10002,CarrierID_P3,A50,Carrier ID for Port 3
|
|---|
| | | 10003,CarrierID_P4,A50,Carrier ID for Port 4
|
|---|
