| | |
|---|
| | | SVID,SV Name,SV Format,SV Remark |
|---|
| | | 100,PortTransferState,U1,0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady |
|---|
| | | 300,AccessMode,U1,1=Manual\r\n2=Auto |
|---|
| | | 100,PortTransferState,U1,0=OutOfService |
|---|
| | | 300,AccessMode,U1,1=Manual |
|---|
| | | 500,Clock,A50, |
|---|
| | | 600,CurrentControlState,U1,0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote |
|---|
| | | 600,CurrentControlState,U1,0:Offline:equipment |
|---|
| | | 601,PreviousControlState,U1, |
|---|
| | | 700,CurrentProcessState,U1,0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM |
|---|
| | | 700,CurrentProcessState,U1,0:DOWN |
|---|
| | | 701,PreviousProcessState,U1, |
|---|
| | | 800,EFEMPPExecName,A20, |
|---|
| | | 801,EQPPExecName,A20, |
|---|
| | | 1000,CJobSpace,U1, |
|---|
| | | 2000,RbRAxisTorque,I2,机器人R轴扭矩 |
|---|
| | | 2001,RbLAxisTorque,l2,机器人L轴扭矩 |
|---|
| | | 2002,RbZAxisTorque,l2,机器人Z轴扭矩 |
|---|
| | | 2003,RbTHAxisTorque,l2,机器人TH轴扭矩 |
|---|
| | | 2004,RbXAxisTorque,l2,机器人X轴扭矩 |
|---|
| | | 2005,AxisX111,l2,X111相机前移栽电机扭矩 |
|---|
| | | 2006,AxisX112,l2,X112相机后移栽电机扭矩 |
|---|
| | | 2007,AxisU113,l2,U113产品旋转电机扭矩 |
|---|
| | | 2008,AxisX114,l2,X114产品左整列电机扭矩 |
|---|
| | | 2009,AxisY121,l2,Y121产品右整列电机扭矩 |
|---|
| | | 2010,AxisY122,l2,Y122产品前整列电机扭矩 |
|---|
| | | 2011,AxisY123,l2,Y123产品后阵列电机扭矩 |
|---|
| | | 2012,MainAir,U2,总进气压力值 |
|---|
| | | 2013,MainVacuum,l2,总真空压力值 |
|---|
| | | 2014,RbMainVacuum,l2,机器人真空值 |
|---|
| | | 2015,LPMainVacuum,l2,LP真空值#D265 |
|---|
| | | 2016,LPMainAir,U2,LP压空值 |
|---|
| | | 2017,ALVacuum,l2,Aligner真空值 |
|---|
| | | 2018,FFU1RPM,U2,FFU1转速 |
|---|
| | | 2019,FFU2RPM,U2,FFU2转速 |
|---|
| | | 2020,FFU3RPM,U2,FFU3转速 |
|---|
| | | 2021,FFU4RPM,U2,FFU4转速 |
|---|
| | | 2022,ESDValue,I2,静电检测值 |
|---|
| | | 2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽" |
|---|
| | | 2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽" |
|---|
| | | 2025,FFUParameter,U2,FFU设定值 |
|---|
| | | 5000,CarrierID,A20,卡匣ID |
|---|
| | | 2000,RbRAxisTorque,I2,机器人R轴扭矩 |
|---|
| | | 2001,RbLAxisTorque,U1,机器人L轴扭矩 |
|---|
| | | 2002,RbZAxisTorque,U1,机器人Z轴扭矩 |
|---|
| | | 2003,RbTHAxisTorque,U1,机器人TH轴扭矩 |
|---|
| | | 2004,RbXAxisTorque,U1,机器人X轴扭矩 |
|---|
| | | 2005,AxisX111,U1,X111相机前移栽电机扭矩 |
|---|
| | | 2006,AxisX112,U1,X112相机后移栽电机扭矩 |
|---|
| | | 2007,AxisU113,U1,U113产品旋转电机扭矩 |
|---|
| | | 2008,AxisX114,U1,X114产品左整列电机扭矩 |
|---|
| | | 2009,AxisY121,U1,Y121产品右整列电机扭矩 |
|---|
| | | 2010,AxisY122,U1,Y122产品前整列电机扭矩 |
|---|
| | | 2011,AxisY123,U1,Y123产品后阵列电机扭矩 |
|---|
| | | 2012,MainAir,U1,总进气压力值 |
|---|
| | | 2013,MainVacuum,U1,总真空压力值 |
|---|
| | | 2014,RbMainVacuum,U1,机器人真空值 |
|---|
| | | 2015,LPMainVacuum,U1,LP真空值#D265 |
|---|
| | | 2016,LPMainAir,U1,LP压空值 |
|---|
| | | 2017,ALVacuum,U1,Aligner真空值 |
|---|
| | | 2018,FFU1RPM,U1,FFU1转速 |
|---|
| | | 2019,FFU2RPM,U1,FFU2转速 |
|---|
| | | 2020,FFU3RPM,U1,FFU3转速 |
|---|
| | | 2021,FFU4RPM,U1,FFU4转速 |
|---|
| | | 2022,ESDValue,I2,静电检测值 |
|---|
| | | 2023,OCREnable,U1,"OCR使能：O:开启 1：屏蔽" |
|---|
| | | 2024,CCDEnable,U1,"CCD使能：O:开启 1：屏蔽" |
|---|
| | | 2025,FFUParameter,U1,FFU设定值 |
|---|
| | | 5000,CarrierID,A20,卡匣ID |
|---|
| | | 5001,CJobSpace,U1,CJ Space |
|---|
| | | 5002,PJobSpace,U1,PJ Space |
|---|
| | | 5003,PJQueued,L,PJ Queued |
|---|
| | | 5004,PJStartID,A20,PJStartID |
|---|
| | | 5005,PJEndID,A20,PJEndID |
|---|
| | | 5006,PanelStartID,A20,PanelStartID |
|---|
| | | 5007,PanelEndID,A20,PanelEndID |
|---|
| | | 5008,CJStartID,A20,CJStartID |
|---|
| | | 5009,CJEndID,A20,CJEndID |
|---|
| | | 5010,UnloadReadyPortId,U1,"Port ID" |
|---|
| | | 5011,LoadReadyPortId,U1,"Port ID" |
|---|
| | | 5012,BlockedPortId,U1,"Port ID" |
|---|
| | | 5013,TestVID,U1,测试添加变量55 |
|---|
| | | 5014,VCRPanelID,A20,Panel id,来自读码器 |
|---|
| | | 5015,ReadyToReleasePortId,U1,"Port ID" |
|---|
| | | 5016,LoadPortNotAssocPortId,U1,"Port ID" |
|---|
| | | 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload string (placeholder) |
|---|
| | | 5018,SubEqpName,A20,Equipment name for EV_SubEqpStart/EV_SubEqpEnd |
|---|
| | | 5019,SubEqpSlot,U1,Slot number for EV_SubEqpStart/EV_SubEqpEnd |
|---|
| | | 5020,PortStateChangePortId,U1,"Port ID for PortStateChange" |
|---|
| | | 5021,PortState,U1,"Port transfer/state code for PortStateChange" |
|---|
| | | 6000,Bonder_SV_ProcessStep,A20,Bonder SV |
|---|
| | | 6001,Bonder_SV_BladderPressure,A20,Bonder SV |
|---|
| | | 6002,Bonder_SV_UpperChamberPressure,A20,Bonder SV |
|---|
| | | 6003,Bonder_SV_PipeVacuumGauge,A20,Bonder SV |
|---|
| | | 6004,Bonder_SV_ChamberVacuumGauge,A20,Bonder SV |
|---|
| | | 6005,Bonder_SV_UpperTemp1,A20,Bonder SV |
|---|
| | | 6006,Bonder_SV_UpperTemp2,A20,Bonder SV |
|---|
| | | 6007,Bonder_SV_UpperTemp3,A20,Bonder SV |
|---|
| | | 6008,Bonder_SV_UpperTemp4,A20,Bonder SV |
|---|
| | | 6009,Bonder_SV_UpperTemp5,A20,Bonder SV |
|---|
| | | 6010,Bonder_SV_UpperTemp6,A20,Bonder SV |
|---|
| | | 6011,Bonder_SV_LowerTemp1,A20,Bonder SV |
|---|
| | | 6012,Bonder_SV_LowerTemp2,A20,Bonder SV |
|---|
| | | 6013,Bonder_SV_LowerTemp3,A20,Bonder SV |
|---|
| | | 6014,Bonder_SV_LowerTemp4,A20,Bonder SV |
|---|
| | | 6015,Bonder_SV_LowerTemp5,A20,Bonder SV |
|---|
| | | 6016,Bonder_SV_LowerTemp6,A20,Bonder SV |
|---|
| | | 6017,Bonder_SV_HeatingRemaining,A20,Bonder SV |
|---|
| | | 6018,Bonder_SV_PressingRemaining,A20,Bonder SV |
|---|
| | | 6100,Bonder_PD_AlignDelay,A20,Bonder ProcessData |
|---|
| | | 6101,Bonder_PD_DwellTime,A20,Bonder ProcessData |
|---|
| | | 6102,Bonder_PD_BreakVacuumDelay,A20,Bonder ProcessData |
|---|
| | | 6103,Bonder_PD_TurboPumpStartDelay,A20,Bonder ProcessData |
|---|
| | | 6104,Bonder_PD_AttachVacuumDelay,A20,Bonder ProcessData |
|---|
| | | 6105,Bonder_PD_HeatingWaitDelay,A20,Bonder ProcessData |
|---|
| | | 6106,Bonder_PD_BladderPressureSet,A20,Bonder ProcessData |
|---|
| | | 6107,Bonder_PD_BladderPressurizeRate,A20,Bonder ProcessData |
|---|
| | | 6108,Bonder_PD_BladderDepressurizeRate,A20,Bonder ProcessData |
|---|
| | | 6109,Bonder_PD_AttachPressureLimit,A20,Bonder ProcessData |
|---|
| | | 6110,Bonder_PD_UpperZTorqueSpeed,A20,Bonder ProcessData |
|---|
| | | 6111,Bonder_PD_UpperTempSet,A20,Bonder ProcessData |
|---|
| | | 6112,Bonder_PD_LowerTempSet,A20,Bonder ProcessData |
|---|
| | | 6113,Bonder_PD_PreAttachSpeed,A20,Bonder ProcessData |
|---|
| | | 6114,Bonder_PD_AttachSpeed,A20,Bonder ProcessData |
|---|
| | | 6115,Bonder_PD_UpperHeatDistance,A20,Bonder ProcessData |
|---|
| | | 6116,Bonder_PD_AttachPressIn,A20,Bonder ProcessData |
|---|
| | | 6117,Bonder_PD_UpperBreakVacuumDist,A20,Bonder ProcessData |
|---|
| | | 6118,Bonder_PD_LowerPinBreakVacuumDist,A20,Bonder ProcessData |
|---|
| | | 6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder ProcessData |
|---|
| | | 6120,Bonder_PD_PumpGaugeSet,A20,Bonder ProcessData |
|---|
| | | 6121,Bonder_PD_TurboReachSet,A20,Bonder ProcessData |
|---|
| | | 10200,SlotMap,U2,SlotMap(Scan) |
|---|
| | | 10201,SlotMapScan,U2,SlotMap(Scan) |
|---|
| | | 10202,SlotMapDownload,U2,SlotMap(Download) |
|---|
