mrDarker
7 天以前 829fe6c6bc33d53fda9c31fd45a37e1df87befff
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DVID,DV Name,DV Format,DV Remark
6000,Bonder_SV_ProcessStep,A20,Bonder SV: 工艺运行步骤
6001,Bonder_SV_BladderPressure,A20,Bonder SV: 气囊压力当前
6002,Bonder_SV_UpperChamberPressure,A20,Bonder SV: 上腔压力合计
6003,Bonder_SV_PipeVacuumGauge,A20,Bonder SV: 管道真空表
6004,Bonder_SV_ChamberVacuumGauge,A20,Bonder SV: 腔体真空表
6005,Bonder_SV_UpperTemp1,A20,Bonder SV: 上腔温度1
6006,Bonder_SV_UpperTemp2,A20,Bonder SV: 上腔温度2
6007,Bonder_SV_UpperTemp3,A20,Bonder SV: 上腔温度3
6008,Bonder_SV_UpperTemp4,A20,Bonder SV: 上腔温度4
6009,Bonder_SV_UpperTemp5,A20,Bonder SV: 上腔温度5
6010,Bonder_SV_UpperTemp6,A20,Bonder SV: 上腔温度6
6011,Bonder_SV_LowerTemp1,A20,Bonder SV: 下腔温度1
6012,Bonder_SV_LowerTemp2,A20,Bonder SV: 下腔温度2
6013,Bonder_SV_LowerTemp3,A20,Bonder SV: 下腔温度3
6014,Bonder_SV_LowerTemp4,A20,Bonder SV: 下腔温度4
6015,Bonder_SV_LowerTemp5,A20,Bonder SV: 下腔温度5
6016,Bonder_SV_LowerTemp6,A20,Bonder SV: 下腔温度6
6017,Bonder_SV_HeatingRemaining,A20,Bonder SV: 加热剩余时间
6018,Bonder_SV_PressingRemaining,A20,Bonder SV: 压合剩余时间
6100,Bonder_PD_AlignDelay,A20,Bonder PD: 对位延时
6101,Bonder_PD_DwellTime,A20,Bonder PD: 保压时间
6102,Bonder_PD_BreakVacuumDelay,A20,Bonder PD: 破真空延时
6103,Bonder_PD_TurboPumpStartDelay,A20,Bonder PD: 分子泵启动延时
6104,Bonder_PD_AttachVacuumDelay,A20,Bonder PD: 抽真空延时
6105,Bonder_PD_HeatingWaitDelay,A20,Bonder PD: 等待加热延时
6106,Bonder_PD_BladderPressureSet,A20,Bonder PD: 气囊压力设定
6107,Bonder_PD_BladderPressurizeRate,A20,Bonder PD: 气囊加压速率
6108,Bonder_PD_BladderDepressurizeRate,A20,Bonder PD: 气囊泄压速率
6109,Bonder_PD_AttachPressureLimit,A20,Bonder PD: 贴合压力上限
6110,Bonder_PD_UpperZTorqueSpeed,A20,Bonder PD: 上腔Z预贴合速度
6111,Bonder_PD_UpperTempSet,A20,Bonder PD: 上腔温度设定
6112,Bonder_PD_LowerTempSet,A20,Bonder PD: 下腔温度设定
6113,Bonder_PD_PreAttachSpeed,A20,Bonder PD: 预贴合速度
6114,Bonder_PD_AttachSpeed,A20,Bonder PD: 贴合速度
6115,Bonder_PD_UpperHeatDistance,A20,Bonder PD: 上腔加热距离
6116,Bonder_PD_AttachPressIn,A20,Bonder PD: 贴合压入力
6117,Bonder_PD_UpperBreakVacuumDist,A20,Bonder PD: 上腔破真空距离
6118,Bonder_PD_LowerPinBreakVacuumDist,A20,Bonder PD: 下顶针破真空距离
6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder PD: 下顶针加热距离
6120,Bonder_PD_PumpGaugeSet,A20,Bonder PD: 真空泵真空设定
6121,Bonder_PD_TurboReachSet,A20,Bonder PD: 分子泵到达设定
6200,VacuumBake_SV_A_ProcessStep,A20,VacuumBake SV A: 工艺运行步骤
6201,VacuumBake_SV_A_ChamberVacuum,A20,VacuumBake SV A: 腔体真空
6202,VacuumBake_SV_A_Temp1,A20,VacuumBake SV A: 温度1
6203,VacuumBake_SV_A_Temp2,A20,VacuumBake SV A: 温度2
6204,VacuumBake_SV_A_Temp4,A20,VacuumBake SV A: 温度4
6205,VacuumBake_SV_A_Temp5,A20,VacuumBake SV A: 温度5
6206,VacuumBake_SV_A_Temp6,A20,VacuumBake SV A: 温度6
6207,VacuumBake_SV_A_Temp7,A20,VacuumBake SV A: 温度7
6208,VacuumBake_SV_A_BakeRemaining,A20,VacuumBake SV A: 烘烤剩余时间
6209,VacuumBake_SV_B_ProcessStep,A20,VacuumBake SV B: 工艺运行步骤
6210,VacuumBake_SV_B_ChamberVacuum,A20,VacuumBake SV B: 腔体真空
6211,VacuumBake_SV_B_Temp1,A20,VacuumBake SV B: 温度1
6212,VacuumBake_SV_B_Temp2,A20,VacuumBake SV B: 温度2
6213,VacuumBake_SV_B_Temp4,A20,VacuumBake SV B: 温度4
6214,VacuumBake_SV_B_Temp5,A20,VacuumBake SV B: 温度5
6215,VacuumBake_SV_B_Temp6,A20,VacuumBake SV B: 温度6
6216,VacuumBake_SV_B_Temp7,A20,VacuumBake SV B: 温度7
6217,VacuumBake_SV_B_BakeRemaining,A20,VacuumBake SV B: 烘烤剩余时间
6300,VacuumBake_PD_ParamIndex,A20,VacuumBake PD: 参数序号
6301,VacuumBake_PD_HeatTime,A20,VacuumBake PD: 加热时间
6302,VacuumBake_PD_BreakVacuumTime,A20,VacuumBake PD: 破真空时间
6303,VacuumBake_PD_VacuumReach,A20,VacuumBake PD: 真空达到值
6304,VacuumBake_PD_TempSet,A20,VacuumBake PD: 主控温度设定
6400,BakeCooling_SV_A_BakeStep,A20,BakeCooling SV A: 烘烤步骤
6401,BakeCooling_SV_A_Temp1,A20,BakeCooling SV A: 温度1
6402,BakeCooling_SV_A_Temp2,A20,BakeCooling SV A: 温度2
6403,BakeCooling_SV_A_Temp4,A20,BakeCooling SV A: 温度4
6404,BakeCooling_SV_A_Temp5,A20,BakeCooling SV A: 温度5
6405,BakeCooling_SV_A_Temp6,A20,BakeCooling SV A: 温度6
6406,BakeCooling_SV_A_Temp7,A20,BakeCooling SV A: 温度7
6407,BakeCooling_SV_A_BakeRemaining,A20,BakeCooling SV A: 烘烤剩余时间
6408,BakeCooling_SV_A_CoolStep,A20,BakeCooling SV A: 冷却步骤
6409,BakeCooling_SV_A_CoolRemaining,A20,BakeCooling SV A: 冷却剩余时间
6410,BakeCooling_SV_B_BakeStep,A20,BakeCooling SV B: 烘烤步骤
6411,BakeCooling_SV_B_Temp1,A20,BakeCooling SV B: 温度1
6412,BakeCooling_SV_B_Temp2,A20,BakeCooling SV B: 温度2
6413,BakeCooling_SV_B_Temp4,A20,BakeCooling SV B: 温度4
6414,BakeCooling_SV_B_Temp5,A20,BakeCooling SV B: 温度5
6415,BakeCooling_SV_B_Temp6,A20,BakeCooling SV B: 温度6
6416,BakeCooling_SV_B_Temp7,A20,BakeCooling SV B: 温度7
6417,BakeCooling_SV_B_BakeRemaining,A20,BakeCooling SV B: 烘烤剩余时间
6418,BakeCooling_SV_B_CoolStep,A20,BakeCooling SV B: 冷却步骤
6419,BakeCooling_SV_B_CoolRemaining,A20,BakeCooling SV B: 冷却剩余时间
6500,BakeCooling_PD_ParamIndex,A20,BakeCooling PD: 参数序号
6501,BakeCooling_PD_TimeOrTemp1,A20,BakeCooling PD: 时间/温度1
6502,BakeCooling_PD_TimeOrTemp2,A20,BakeCooling PD: 时间/温度2
6503,BakeCooling_PD_Reserved,A20,BakeCooling PD: 预留
6600,Measurement_SV_ProcessStep,A20,Measurement SV: 工艺运行步骤
6601,Measurement_SV_AOIScore,A20,Measurement SV: AOI分数
6700,Measurement_PD_ParamIndex,A20,Measurement PD: 参数序号
6701,Measurement_PD_Time,A20,Measurement PD: 时间
6702,Measurement_PD_Value1,A20,Measurement PD: 测量值1
6703,Measurement_PD_Value2,A20,Measurement PD: 测量值2
10200,SlotMap,U1,SlotMap(Scan)
10201,SlotMapScan,U1,SlotMap(Scan)
10202,SlotMapDownload,U1,SlotMap(Download)