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| [LoadPort 1]
| Left=44
| Top=64
| [LoadPort 2]
| Left=30
| Top=317
| [LoadPort 3]
| Left=70
| Top=615
| [LoadPort 4]
| Left=57
| Top=466
| [EFEM(ROBOT)]
| Left=381
| Top=42
| [Bonder 1]
| Left=762
| Top=317
| [Bonder 2]
| Left=781
| Top=504
| [Fliper]
| Left=279
| Top=297
| [Aligner]
| Left=320
| Top=317
| [VacuumBake]
| Left=279
| Top=437
| [BakeCooling]
| Left=994
| Top=317
| [ARM]
| Left=722
| Top=42
| [Arm Tray1]
| Left=554
| Top=42
| [Arm Tray2]
| Left=554
| Top=141
| [Fliper(G2)]
| Left=529
| Top=317
| [VacuumBake(G1)]
| Left=529
| Top=466
| [Measurement]
| Left=1207
| Top=317
|
|
