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| SVID,SV Name,SV Format,SV Remark
| 100,PortTransferState,U1,0=OutOfService
| 300,AccessMode,U1,1=Manual
| 500,Clock,A50,
| 600,CurrentControlState,U1,0:Offline:equipment
| 601,PreviousControlState,U1,
| 700,CurrentProcessState,U1,0:DOWN
| 701,PreviousProcessState,U1,
| 800,EFEMPPExecName,A20,
| 801,EQPPExecName,A20,
| 2000,RbRAxisTorque,I2,机器人R轴扭矩
| 2001,RbLAxisTorque,U1,机器人L轴扭矩
| 2002,RbZAxisTorque,U1,机器人Z轴扭矩
| 2003,RbTHAxisTorque,U1,机器人TH轴扭矩
| 2004,RbXAxisTorque,U1,机器人X轴扭矩
| 2005,AxisX111,U1,X111相机前移栽电机扭矩
| 2006,AxisX112,U1,X112相机后移栽电机扭矩
| 2007,AxisU113,U1,U113产品旋转电机扭矩
| 2008,AxisX114,U1,X114产品左整列电机扭矩
| 2009,AxisY121,U1,Y121产品右整列电机扭矩
| 2010,AxisY122,U1,Y122产品前整列电机扭矩
| 2011,AxisY123,U1,Y123产品后阵列电机扭矩
| 2012,MainAir,U1,总进气压力值
| 2013,MainVacuum,U1,总真空压力值
| 2014,RbMainVacuum,U1,机器人真空值
| 2015,LPMainVacuum,U1,LP真空值#D265
| 2016,LPMainAir,U1,LP压空值
| 2017,ALVacuum,U1,Aligner真空值
| 2018,FFU1RPM,U1,FFU1转速
| 2019,FFU2RPM,U1,FFU2转速
| 2020,FFU3RPM,U1,FFU3转速
| 2021,FFU4RPM,U1,FFU4转速
| 2022,ESDValue,I2,静电检测值
| 2023,OCREnable,U1,"OCR使能：O:开启 1：屏蔽"
| 2024,CCDEnable,U1,"CCD使能：O:开启 1：屏蔽"
| 2025,FFUParameter,U1,FFU设定值
| 5000,CarrierID,A20,卡匣ID
| 5001,CJobSpace,U1,CJ Space
| 5002,PJobSpace,U1,PJ Space
| 5003,PJQueued,L,PJ Queued
| 5004,PJStartID,A20,PJStartID
| 5005,PJEndID,A20,PJEndID
| 5006,PanelStartID,A20,PanelStartID
| 5007,PanelEndID,A20,PanelEndID
| 5008,CJStartID,A20,CJStartID
| 5009,CJEndID,A20,CJEndID
| 5010,UnloadReadyPortId,U1,"Port ID"
| 5011,LoadReadyPortId,U1,"Port ID"
| 5012,BlockedPortId,U1,"Port ID"
| 5013,TestVID,U1,测试添加变量55
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