1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
| SVID,SV Name,SV Format,SV Remark
| 10000,CarrierID_P1,A50,Carrier ID for Port 1
| 10001,CarrierID_P2,A50,Carrier ID for Port 2
| 10002,CarrierID_P3,A50,Carrier ID for Port 3
| 10003,CarrierID_P4,A50,Carrier ID for Port 4
| 100,PortTransferState_P1,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
| 101,PortTransferState_P2,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
| 102,PortTransferState_P3,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
| 103,PortTransferState_P4,U1,1=LoadReady;2=Loaded;3=InUse;4=UnloadReady;5=Empty;6=Blocked
| 300,AccessMode_P1,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
| 301,AccessMode_P2,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
| 302,AccessMode_P3,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
| 303,AccessMode_P4,U1,0=OutOfService;1=TransferBlocked;2=ReadyToLoad;3=ReadyToUnload;4=InService;5=TransferReady
| 500,Clock,A50,Current timestamp string
| 600,CurrentControlState,U1,0=OfflineEquipment;1=OfflineAttempt;2=Online;3=OfflineHost;4=OnlineLocal;5=OnlineRemote
| 601,PreviousControlState,U1,Previous control state (same code set as CurrentControlState)
| 700,CurrentProcessState,U1,0=Ready;1=Processing;2=Complete;3=Error
| 701,PreviousProcessState,U1,Previous process state (0=Ready;1=Processing;2=Complete;3=Error)
| 800,EFEMPPExecName,A20,Current PPExec name from EFEM
| 801,EQPPExecName,A20,Current PPExec name from equipment
| 8100,Bonder1CurrentRecipe,A50,Current recipe for Bonder1
| 8101,Bonder2CurrentRecipe,A50,Current recipe for Bonder2
| 8102,VacuumBakeCurrentRecipe,A50,Current recipe for VacuumBake
| 8103,BakeCoolingCurrentRecipe,A50,Current recipe for BakeCooling
| 8104,MeasurementCurrentRecipe,A50,Current recipe for Measurement
| 8105,EFEMCurrentRecipe,A50,Current recipe for EFEM
| 5001,CJobSpace,U1,CJ Space
| 5002,PJobSpace,U1,PJ Space
| 5003,PJQueued,L,PJ queued list (IDs)
| 5004,PJStartID,A20,PJ start ID
| 5005,PJEndID,A20,PJ end ID
| 5006,PanelStartID,A20,Panel start ID
| 5007,PanelEndID,A20,Panel end ID
| 5008,CJStartID,A20,CJ start ID
| 5009,CJEndID,A20,CJ end ID
| 5014,VCRPanelID,A20,Panel ID from reader
| 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload (placeholder)
| 5018,SubEqpName,A20,Sub equipment name (SubEqp/Unit/Process/SV/ProcessData events)
| 5019,SubEqpSlot,U1,Slot number for SubEqp/Unit; 0 when not applicable
| 5021,PortState,U1,Port transfer/state code for PortStateChange
| 5022,PortId,U1,Unified port ID for all Port events
| 5023,MaterialId,A50,Material/Glass ID for Received/SentOut events
|
|