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| No,UNIT ID,UNIT NO,Alarm Level,Alarm Code,AlarmID,Alarm Text,Description
| 1,EFEM(ROBOT)-EFEM,,0,2,100,Fatal communication error in the ACLS receive loop. Please reboot MCC., Fatal communication error in the ACLS receive loop. Please reboot MCC.
| 2,Load Port 1-EFEM,,1,1,101,"Must check substrate location due to the failure of ACLS operation <%s> ; To protect glass, a dummy glass has been created"," Must check substrate location due to the failure of ACLS operation <%s> ; To protect glass, a dummy glass has been created"
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