No,UNIT ID,UNIT NO,Alarm Level,Alarm Code,AlarmID,Alarm Text,Description 1,EFEM,100,0,0,1000,»úÆ÷ÈËCCLinkÁ´½ÓÒì³£,"Çë¼ì²é½ÓÏß,¶ÏµçÖØÆô" 2,EFEM,101,0,0,1001,Ïà»úCCLinkÁ´½ÓÒì³£,"Çë¼ì²é½ÓÏß,¶ÏµçÖØÆô" 3,EFEM,102,0,0,1002,¾²µç²âÊÔCCLinkÁ´½ÓÒì³£,"Çë¼ì²é½ÓÏß,¶ÏµçÖØÆô" 4,EFEM,103,0,0,1003,, 5,EFEM,104,0,0,1004,, 6,EFEM,105,0,0,1005,, 7,EFEM,106,0,0,1006,, 8,EFEM,107,0,0,1007,, 9,EFEM,108,0,0,1008,, 10,EFEM,109,0,0,1009,, 11,EFEM,110,0,0,1010,×ܽøÆøÆøѹÒì³£,Çë¼ì²â½øÆø 12,EFEM,111,0,0,1011,×ÜÕæ¿ÕÆøѹÒì³£,Çë¼ì²âÕæ¿Õ 13,EFEM,112,0,0,1012,LPÕæ¿ÕÒì³£,¼ì²âÕæ¿Õ 14,EFEM,113,0,0,1013,Àë×Ó·ç°ôѹ¿ÕÒì³£,Çë¼ì²â½øÆø 15,EFEM,114,0,0,1014,»úÆ÷ÈËÕæ¿ÕÒì³£,Çë¼ì²âÕæ¿Õ 16,EFEM,115,0,0,1015,¼±Í£±»°´ÏÂ,Çë¼ì²é¼±Í£°´Å¥ 17,EFEM,116,0,0,1016,, 18,EFEM,117,0,0,1017,, 19,EFEM,118,0,0,1018,, 20,EFEM,119,0,0,1019,, 21,EFEM,120,0,0,1020,°²È«ÃÅ´ò¿ª,Çë¼ì²é°²È«ÃÅ 22,EFEM,121,0,0,1021,ÕýÃæ×óÃÅ´ò¿ªÖÐ,Çë¼ì²é°²È«ÃÅ 23,EFEM,122,0,0,1022,ÕýÃæÓÒÃÅ´ò¿ªÖÐ,Çë¼ì²é°²È«ÃÅ 24,EFEM,123,0,0,1023,²àÃæ×óÃÅ´ò¿ªÖÐ,Çë¼ì²é°²È«ÃÅ 25,EFEM,124,0,0,1024,²àÃæÓÒÃÅ´ò¿ªÖÐ,Çë¼ì²é°²È«ÃÅ 26,EFEM,125,0,0,1025,±³Ãæ×óÃÅ´ò¿ªÖÐ,Çë¼ì²é°²È«ÃÅ 27,EFEM,126,0,0,1026,±³ÃæÓÒÃÅ´ò¿ªÖÐ,Çë¼ì²é°²È«ÃÅ 28,EFEM,127,0,0,1027,, 29,EFEM,128,0,0,1028,, 30,EFEM,129,0,0,1029,, 31,EFEM,130,0,0,1030,, 32,EFEM,131,0,0,1031,"Port1_E84Á÷³ÌÒì³£,OHT_TR_REQ_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 33,EFEM,132,0,0,1032,"Port1_E84Á÷³ÌÒì³£,OHT_BUSY_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 34,EFEM,133,0,0,1033,"Port1_E84Á÷³ÌÒì³£,OHT_COMPT_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 35,EFEM,134,0,0,1034,, 36,EFEM,135,0,0,1035,, 37,EFEM,136,0,0,1036,, 38,EFEM,137,0,0,1037,, 39,EFEM,138,0,0,1038,, 40,EFEM,139,0,0,1039,, 41,EFEM,140,1,0,1040,"Port1_E84Á÷³ÌÍ£Ö¹,OHT_VALIDÐźÅÒì³£",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 42,EFEM,141,1,0,1041,"Port1_E84Á÷³ÌÍ£Ö¹,¹âÕ¤±»ÕÚµ²»òÕß¼±Í£±»ÅÄ",Çë¼ì²é¹âÕ¤Ðźż±Í£ 43,EFEM,142,1,0,1042,"Port1_E84Á÷³ÌÍ£Ö¹,OHT_È¡»ò·ÅFOUP³¬Ê±","OHT_BUSYºóδÔڹ涨ʱ¼äÄÚÈ¡×ßFOUP,Çë¼ì²éOHT»òÕߺ˶ÔLP״̬" 44,EFEM,143,1,0,1043,"Port1_E84Á÷³ÌÍ£Ö¹,OHT_BUSY_OFF»òÕßTR_REQ_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 45,EFEM,144,0,0,1044,, 46,EFEM,145,0,0,1045,, 47,EFEM,146,0,0,1046,, 48,EFEM,147,0,0,1047,, 49,EFEM,148,0,0,1048,, 50,EFEM,149,0,0,1049,, 51,EFEM,150,0,0,1050,"Port2_E84Á÷³ÌÒì³£,OHT_TR_REQ_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 52,EFEM,151,0,0,1051,"Port2_E84Á÷³ÌÒì³£,OHT_BUSY_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 53,EFEM,152,0,0,1052,"Port2_E84Á÷³ÌÒì³£,OHT_COMPT_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 54,EFEM,153,0,0,1053,, 55,EFEM,154,0,0,1054,, 56,EFEM,155,0,0,1055,, 57,EFEM,156,0,0,1056,, 58,EFEM,157,0,0,1057,, 59,EFEM,158,0,0,1058,, 60,EFEM,159,0,0,1059,, 61,EFEM,160,0,0,1060,"Port2_E84Á÷³ÌÍ£Ö¹,OHT_VALIDÐźÅÒì³£",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 62,EFEM,161,0,0,1061,"Port2_E84Á÷³ÌÍ£Ö¹,¹âÕ¤±»ÕÚµ²»òÕß¼±Í£±»ÅÄ",Çë¼ì²é¹âÕ¤Ðźż±Í£ 63,EFEM,162,0,0,1062,"Port2_E84Á÷³ÌÍ£Ö¹,OHT_È¡»ò·ÅFOUP³¬Ê±","OHT_BUSYºóδÔڹ涨ʱ¼äÄÚÈ¡×ßFOUP,Çë¼ì²éOHT»òÕߺ˶ÔLP״̬" 64,EFEM,163,0,0,1063,"Port2_E84Á÷³ÌÍ£Ö¹,OHT_BUSY_OFF»òÕßTR_REQ_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 65,EFEM,164,0,0,1064,, 66,EFEM,165,0,0,1065,, 67,EFEM,166,0,0,1066,, 68,EFEM,167,0,0,1067,, 69,EFEM,168,0,0,1068,, 70,EFEM,169,0,0,1069,, 71,EFEM,170,1,0,1070,, 72,EFEM,171,1,0,1071,"Port3_E84Á÷³ÌÍ£Ö¹,OHT_VALIDÐźÅÒì³£",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 73,EFEM,172,1,0,1072,"Port3_E84Á÷³ÌÍ£Ö¹,¹âÕ¤±»ÕÚµ²»òÕß¼±Í£±»ÅÄ",Çë¼ì²é¹âÕ¤Ðźż±Í£ 74,EFEM,173,1,0,1073,"Port3_E84Á÷³ÌÍ£Ö¹,OHT_È¡»ò·ÅFOUP³¬Ê±","OHT_BUSYºóδÔڹ涨ʱ¼äÄÚÈ¡×ßFOUP,Çë¼ì²éOHT»òÕߺ˶ÔLP״̬" 75,EFEM,174,1,0,1074,"Port3_E84Á÷³ÌÍ£Ö¹,OHT_BUSY_OFF»òÕßTR_REQ_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 76,EFEM,175,1,0,1075,, 77,EFEM,176,1,0,1076,, 78,EFEM,177,1,0,1077,, 79,EFEM,178,1,0,1078,, 80,EFEM,179,1,0,1079,, 81,EFEM,180,1,0,1080,"Port3_E84Á÷³ÌÒì³£,OHT_TR_REQ_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 82,EFEM,181,1,0,1081,"Port3_E84Á÷³ÌÒì³£,OHT_BUSY_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 83,EFEM,182,1,0,1082,"Port3_E84Á÷³ÌÒì³£,OHT_COMPT_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 84,EFEM,183,1,0,1083,, 85,EFEM,184,1,0,1084,, 86,EFEM,185,1,0,1085,, 87,EFEM,186,1,0,1086,, 88,EFEM,187,1,0,1087,, 89,EFEM,188,1,0,1088,, 90,EFEM,189,1,0,1089,, 91,EFEM,190,1,0,1090,, 92,EFEM,191,1,0,1091,"Port4_E84Á÷³ÌÍ£Ö¹,OHT_VALIDÐźÅÒì³£",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 93,EFEM,192,1,0,1092,"Port4_E84Á÷³ÌÍ£Ö¹,¹âÕ¤±»ÕÚµ²»òÕß¼±Í£±»ÅÄ",Çë¼ì²é¹âÕ¤Ðźż±Í£ 94,EFEM,193,1,0,1093,"Port4_E84Á÷³ÌÍ£Ö¹,OHT_È¡»ò·ÅFOUP³¬Ê±","OHT_BUSYºóδÔڹ涨ʱ¼äÄÚÈ¡×ßFOUP,Çë¼ì²éOHT»òÕߺ˶ÔLP״̬" 95,EFEM,194,1,0,1094,"Port4_E84Á÷³ÌÍ£Ö¹,OHT_BUSY_OFF»òÕßTR_REQ_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 96,EFEM,195,1,0,1095,, 97,EFEM,196,1,0,1096,, 98,EFEM,197,1,0,1097,, 99,EFEM,198,1,0,1098,, 100,EFEM,199,1,0,1099,, 101,EFEM,200,1,0,1100,"Port4_E84Á÷³ÌÒì³£,OHT_TR_REQ_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 102,EFEM,201,1,0,1101,"Port4_E84Á÷³ÌÒì³£,OHT_BUSY_ONÐźų¬Ê±",Çë¼ì²éOHT»òÕßE84ÏßÀ 103,EFEM,202,1,0,1102,"Port4_E84Á÷³ÌÒì³£,OHT_COMPT_OFFÐźų¬Ê±",Çë¼ì²éOHTÐźŻòÕßE84ÏßÀ 104,EFEM,203,1,0,1103,, 105,EFEM,204,1,0,1104,, 106,EFEM,205,1,0,1105,, 107,EFEM,206,1,0,1106,, 108,EFEM,207,1,0,1107,, 109,EFEM,208,1,0,1108,, 110,EFEM,209,1,0,1109,, 111,EFEM,210,0,0,1110,»ØÔµãʧ°Ü/³¬Ê±,Çë¼ì²éÉ豸״̬ÒÔ¼°ÖáλÖÃÊÇ·ñÓиÉÉ棬ÇëÖØÐÂÖ´ÐлØÔ²Ù×÷ 112,EFEM,211,0,0,1111,Flip¹¤Î»£¬Õæ¿Õ´ò¿ªÊ±ÔÚºÉÒì³£,Çë¼ì²é²£Á§Î»Öà 113,EFEM,212,1,0,1112,, 114,EFEM,213,1,0,1113,, 115,EFEM,214,1,0,1114,, 116,EFEM,215,1,0,1115,, 117,EFEM,216,1,0,1116,, 118,EFEM,217,1,0,1117,, 119,EFEM,218,1,0,1118,, 120,EFEM,219,1,0,1119,, 121,EFEM,220,1,0,1120,ÈÎÎñÈ¡Ïûʧ°Ü£¬µ±Ç°È¡ÏûÈÎÎñÌõ¼þ²»Âú×ã 122,EFEM,221,1,0,1121,ÈÎÎñÖØÊÔʧ°Ü£¬µ±Ç°ÖØÊÔÈÎÎñÌõ¼þ²»Âú×ã
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