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| SVID,SV Name,SV Format,SV Remark
| 100,PortTransferState,U1,0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady
| 300,AccessMode,U1,1=Manual\r\n2=Auto
| 500,Clock,A50,
| 600,CurrentControlState,U1,0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote
| 601,PreviousControlState,U1,
| 700,CurrentProcessState,U1,0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM
| 701,PreviousProcessState,U1,
| 800,EFEMPPExecName,A20,
| 801,EQPPExecName,A20,
| 2000,RbRAxisTorque,I2,机器人R轴扭矩
| 2001,RbLAxisTorque,l2,机器人L轴扭矩
| 2002,RbZAxisTorque,l2,机器人Z轴扭矩
| 2003,RbTHAxisTorque,l2,机器人TH轴扭矩
| 2004,RbXAxisTorque,l2,机器人X轴扭矩
| 2005,AxisX111,l2,X111相机前移栽电机扭矩
| 2006,AxisX112,l2,X112相机后移栽电机扭矩
| 2007,AxisU113,l2,U113产品旋转电机扭矩
| 2008,AxisX114,l2,X114产品左整列电机扭矩
| 2009,AxisY121,l2,Y121产品右整列电机扭矩
| 2010,AxisY122,l2,Y122产品前整列电机扭矩
| 2011,AxisY123,l2,Y123产品后阵列电机扭矩
| 2012,MainAir,U2,总进气压力值
| 2013,MainVacuum,l2,总真空压力值
| 2014,RbMainVacuum,l2,机器人真空值
| 2015,LPMainVacuum,l2,LP真空值#D265
| 2016,LPMainAir,U2,LP压空值
| 2017,ALVacuum,l2,Aligner真空值
| 2018,FFU1RPM,U2,FFU1转速
| 2019,FFU2RPM,U2,FFU2转速
| 2020,FFU3RPM,U2,FFU3转速
| 2021,FFU4RPM,U2,FFU4转速
| 2022,ESDValue,I2,静电检测值
| 2023,OCREnable,U2,"OCR使能：O:开启 1：屏蔽"
| 2024,CCDEnable,U2,"CCD使能：O:开启 1：屏蔽"
| 2025,FFUParameter,U2,FFU设定值
| 5000,CarrierID,A20,卡匣ID
| 5001,CJobSpace,U1,CJ Space
| 5002,PJobSpace,U1,PJ Space
| 5003,PJQueued,L,PJ Queued
| 5004,PJStartID,A20,PJStartID
| 5005,PJEndID,A20,PJEndID
| 5006,PanelStartID,A20,PanelStartID
| 5007,PanelEndID,A20,PanelEndID
|
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