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| SVID,SV Name,SV Format,SV Remark
| 100,PortTransferState,U1,0=OutOfService
| 300,AccessMode,U1,1=Manual
| 500,Clock,A50,
| 600,CurrentControlState,U1,0:Offline:equipment
| 601,PreviousControlState,U1,
| 700,CurrentProcessState,U1,0:DOWN
| 701,PreviousProcessState,U1,
| 800,EFEMPPExecName,A20,
| 801,EQPPExecName,A20,
| 2000,RbRAxisTorque,I2,机器人R轴扭矩
| 2001,RbLAxisTorque,U1,机器人L轴扭矩
| 2002,RbZAxisTorque,U1,机器人Z轴扭矩
| 2003,RbTHAxisTorque,U1,机器人TH轴扭矩
| 2004,RbXAxisTorque,U1,机器人X轴扭矩
| 2005,AxisX111,U1,X111相机前移栽电机扭矩
| 2006,AxisX112,U1,X112相机后移栽电机扭矩
| 2007,AxisU113,U1,U113产品旋转电机扭矩
| 2008,AxisX114,U1,X114产品左整列电机扭矩
| 2009,AxisY121,U1,Y121产品右整列电机扭矩
| 2010,AxisY122,U1,Y122产品前整列电机扭矩
| 2011,AxisY123,U1,Y123产品后阵列电机扭矩
| 2012,MainAir,U1,总进气压力值
| 2013,MainVacuum,U1,总真空压力值
| 2014,RbMainVacuum,U1,机器人真空值
| 2015,LPMainVacuum,U1,LP真空值#D265
| 2016,LPMainAir,U1,LP压空值
| 2017,ALVacuum,U1,Aligner真空值
| 2018,FFU1RPM,U1,FFU1转速
| 2019,FFU2RPM,U1,FFU2转速
| 2020,FFU3RPM,U1,FFU3转速
| 2021,FFU4RPM,U1,FFU4转速
| 2022,ESDValue,I2,静电检测值
| 2023,OCREnable,U1,"OCR使能：O:开启 1：屏蔽"
| 2024,CCDEnable,U1,"CCD使能：O:开启 1：屏蔽"
| 2025,FFUParameter,U1,FFU设定值
| 5000,CarrierID,A20,卡匣ID
| 5001,CJobSpace,U1,CJ Space
| 5002,PJobSpace,U1,PJ Space
| 5003,PJQueued,L,PJ Queued
| 5004,PJStartID,A20,PJStartID
| 5005,PJEndID,A20,PJEndID
| 5006,PanelStartID,A20,PanelStartID
| 5007,PanelEndID,A20,PanelEndID
| 5008,CJStartID,A20,CJStartID
| 5009,CJEndID,A20,CJEndID
| 5010,UnloadReadyPortId,U1,"Port ID"
| 5011,LoadReadyPortId,U1,"Port ID"
| 5012,BlockedPortId,U1,"Port ID"
| 5013,TestVID,U1,测试添加变量55
| 5014,VCRPanelID,A20,Panel id,来自读码器
| 5015,ReadyToReleasePortId,U1,"Port ID"
| 5016,LoadPortNotAssocPortId,U1,"Port ID"
| 5017,ProcessDataReportText,A50,EV_PROCESS_DATA_REPORT payload string (placeholder)
| 5018,SubEqpName,A20,Equipment name for EV_SubEqpStart/EV_SubEqpEnd
| 5019,SubEqpSlot,U1,Slot number for EV_SubEqpStart/EV_SubEqpEnd
| 5020,PortStateChangePortId,U1,"Port ID for PortStateChange"
| 5021,PortState,U1,"Port transfer/state code for PortStateChange"
| 6000,Bonder_SV_ProcessStep,A20,Bonder SV
| 6001,Bonder_SV_BladderPressure,A20,Bonder SV
| 6002,Bonder_SV_UpperChamberPressure,A20,Bonder SV
| 6003,Bonder_SV_PipeVacuumGauge,A20,Bonder SV
| 6004,Bonder_SV_ChamberVacuumGauge,A20,Bonder SV
| 6005,Bonder_SV_UpperTemp1,A20,Bonder SV
| 6006,Bonder_SV_UpperTemp2,A20,Bonder SV
| 6007,Bonder_SV_UpperTemp3,A20,Bonder SV
| 6008,Bonder_SV_UpperTemp4,A20,Bonder SV
| 6009,Bonder_SV_UpperTemp5,A20,Bonder SV
| 6010,Bonder_SV_UpperTemp6,A20,Bonder SV
| 6011,Bonder_SV_LowerTemp1,A20,Bonder SV
| 6012,Bonder_SV_LowerTemp2,A20,Bonder SV
| 6013,Bonder_SV_LowerTemp3,A20,Bonder SV
| 6014,Bonder_SV_LowerTemp4,A20,Bonder SV
| 6015,Bonder_SV_LowerTemp5,A20,Bonder SV
| 6016,Bonder_SV_LowerTemp6,A20,Bonder SV
| 6017,Bonder_SV_HeatingRemaining,A20,Bonder SV
| 6018,Bonder_SV_PressingRemaining,A20,Bonder SV
| 6100,Bonder_PD_AlignDelay,A20,Bonder ProcessData
| 6101,Bonder_PD_DwellTime,A20,Bonder ProcessData
| 6102,Bonder_PD_BreakVacuumDelay,A20,Bonder ProcessData
| 6103,Bonder_PD_TurboPumpStartDelay,A20,Bonder ProcessData
| 6104,Bonder_PD_AttachVacuumDelay,A20,Bonder ProcessData
| 6105,Bonder_PD_HeatingWaitDelay,A20,Bonder ProcessData
| 6106,Bonder_PD_BladderPressureSet,A20,Bonder ProcessData
| 6107,Bonder_PD_BladderPressurizeRate,A20,Bonder ProcessData
| 6108,Bonder_PD_BladderDepressurizeRate,A20,Bonder ProcessData
| 6109,Bonder_PD_AttachPressureLimit,A20,Bonder ProcessData
| 6110,Bonder_PD_UpperZTorqueSpeed,A20,Bonder ProcessData
| 6111,Bonder_PD_UpperTempSet,A20,Bonder ProcessData
| 6112,Bonder_PD_LowerTempSet,A20,Bonder ProcessData
| 6113,Bonder_PD_PreAttachSpeed,A20,Bonder ProcessData
| 6114,Bonder_PD_AttachSpeed,A20,Bonder ProcessData
| 6115,Bonder_PD_UpperHeatDistance,A20,Bonder ProcessData
| 6116,Bonder_PD_AttachPressIn,A20,Bonder ProcessData
| 6117,Bonder_PD_UpperBreakVacuumDist,A20,Bonder ProcessData
| 6118,Bonder_PD_LowerPinBreakVacuumDist,A20,Bonder ProcessData
| 6119,Bonder_PD_LowerPinHeatDistance,A20,Bonder ProcessData
| 6120,Bonder_PD_PumpGaugeSet,A20,Bonder ProcessData
| 6121,Bonder_PD_TurboReachSet,A20,Bonder ProcessData
| 6200,VacuumBake_SV_A_ProcessStep,A20,VacuumBake SV
| 6201,VacuumBake_SV_A_ChamberVacuum,A20,VacuumBake SV
| 6202,VacuumBake_SV_A_Temp1,A20,VacuumBake SV
| 6203,VacuumBake_SV_A_Temp2,A20,VacuumBake SV
| 6204,VacuumBake_SV_A_Temp4,A20,VacuumBake SV
| 6205,VacuumBake_SV_A_Temp5,A20,VacuumBake SV
| 6206,VacuumBake_SV_A_Temp6,A20,VacuumBake SV
| 6207,VacuumBake_SV_A_Temp7,A20,VacuumBake SV
| 6208,VacuumBake_SV_A_BakeRemaining,A20,VacuumBake SV
| 6209,VacuumBake_SV_B_ProcessStep,A20,VacuumBake SV
| 6210,VacuumBake_SV_B_ChamberVacuum,A20,VacuumBake SV
| 6211,VacuumBake_SV_B_Temp1,A20,VacuumBake SV
| 6212,VacuumBake_SV_B_Temp2,A20,VacuumBake SV
| 6213,VacuumBake_SV_B_Temp4,A20,VacuumBake SV
| 6214,VacuumBake_SV_B_Temp5,A20,VacuumBake SV
| 6215,VacuumBake_SV_B_Temp6,A20,VacuumBake SV
| 6216,VacuumBake_SV_B_Temp7,A20,VacuumBake SV
| 6217,VacuumBake_SV_B_BakeRemaining,A20,VacuumBake SV
| 6300,VacuumBake_PD_ParamIndex,A20,VacuumBake ProcessData
| 6301,VacuumBake_PD_HeatTime,A20,VacuumBake ProcessData
| 6302,VacuumBake_PD_BreakVacuumTime,A20,VacuumBake ProcessData
| 6303,VacuumBake_PD_VacuumReach,A20,VacuumBake ProcessData
| 6304,VacuumBake_PD_TempSet,A20,VacuumBake ProcessData
| 6400,BakeCooling_SV_A_BakeStep,A20,BakeCooling SV
| 6401,BakeCooling_SV_A_Temp1,A20,BakeCooling SV
| 6402,BakeCooling_SV_A_Temp2,A20,BakeCooling SV
| 6403,BakeCooling_SV_A_Temp4,A20,BakeCooling SV
| 6404,BakeCooling_SV_A_Temp5,A20,BakeCooling SV
| 6405,BakeCooling_SV_A_Temp6,A20,BakeCooling SV
| 6406,BakeCooling_SV_A_Temp7,A20,BakeCooling SV
| 6407,BakeCooling_SV_A_BakeRemaining,A20,BakeCooling SV
| 6408,BakeCooling_SV_A_CoolStep,A20,BakeCooling SV
| 6409,BakeCooling_SV_A_CoolRemaining,A20,BakeCooling SV
| 6410,BakeCooling_SV_B_BakeStep,A20,BakeCooling SV
| 6411,BakeCooling_SV_B_Temp1,A20,BakeCooling SV
| 6412,BakeCooling_SV_B_Temp2,A20,BakeCooling SV
| 6413,BakeCooling_SV_B_Temp4,A20,BakeCooling SV
| 6414,BakeCooling_SV_B_Temp5,A20,BakeCooling SV
| 6415,BakeCooling_SV_B_Temp6,A20,BakeCooling SV
| 6416,BakeCooling_SV_B_Temp7,A20,BakeCooling SV
| 6417,BakeCooling_SV_B_BakeRemaining,A20,BakeCooling SV
| 6418,BakeCooling_SV_B_CoolStep,A20,BakeCooling SV
| 6419,BakeCooling_SV_B_CoolRemaining,A20,BakeCooling SV
| 6500,BakeCooling_PD_ParamIndex,A20,BakeCooling ProcessData
| 6501,BakeCooling_PD_TimeOrTemp1,A20,BakeCooling ProcessData
| 6502,BakeCooling_PD_TimeOrTemp2,A20,BakeCooling ProcessData
| 6503,BakeCooling_PD_Reserved,A20,BakeCooling ProcessData
| 6600,Measurement_SV_ProcessStep,A20,Measurement SV
| 6601,Measurement_SV_AOIScore,A20,Measurement SV
| 6700,Measurement_PD_ParamIndex,A20,Measurement ProcessData
| 6701,Measurement_PD_Time,A20,Measurement ProcessData
| 6702,Measurement_PD_Value1,A20,Measurement ProcessData
| 6703,Measurement_PD_Value2,A20,Measurement ProcessData
| 10200,SlotMap,U2,SlotMap(Scan)
| 10201,SlotMapScan,U2,SlotMap(Scan)
| 10202,SlotMapDownload,U2,SlotMap(Download)
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