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| SVID,SV Name,SV Format,SV Remark
| 100,PortTransferState,U1,0=OutOfService\r\n1=TransferBlocked\r\n2=ReadyToLoad\r\n3=ReadyToUnload\r\n4=InService\r\n5=TransferReady
| 300,AccessMode,U1,1=Manual\r\n2=Auto
| 500,Clock,A50,
| 600,CurrentControlState,U1,0:Offline:equipment\r\n1:Offline-Attempt\r\n2:Online\r\n3:Offline:host\r\n4:Online:Local\r\n5:Online:Remote
| 601,PreviousControlState,U1,
| 700,CurrentProcessState,U1,0:DOWN\r\n1:IDLE\r\n2.SETUP\r\n3.EXCUTING\r\n4.MAINTAIN\r\n5.ALARM
| 701,PreviousProcessState,U1,
| 800,EFEMPPExecName,A20,
| 801,EQPPExecName,A20,
| 2000,RbRAxisTorque,I2,»úÆ÷ÈËRÖáŤ¾Ø
| 2001,RbLAxisTorque,l2,»úÆ÷ÈËLÖáŤ¾Ø
| 2002,RbZAxisTorque,l2,»úÆ÷ÈËZÖáŤ¾Ø
| 2003,RbTHAxisTorque,l2,»úÆ÷ÈËTHÖáŤ¾Ø
| 2004,RbXAxisTorque,l2,»úÆ÷ÈËXÖáŤ¾Ø
| 2005,AxisX111,l2,X111Ïà»úÇ°ÒÆÔÔµç»úŤ¾Ø
| 2006,AxisX112,l2,X112Ïà»úºóÒÆÔÔµç»úŤ¾Ø
| 2007,AxisU113,l2,U113²úÆ·Ðýתµç»úŤ¾Ø
| 2008,AxisX114,l2,X114²úÆ·×óÕûÁеç»úŤ¾Ø
| 2009,AxisY121,l2,Y121²úÆ·ÓÒÕûÁеç»úŤ¾Ø
| 2010,AxisY122,l2,Y122²úÆ·Ç°ÕûÁеç»úŤ¾Ø
| 2011,AxisY123,l2,Y123²úÆ·ºóÕóÁеç»úŤ¾Ø
| 2012,MainAir,U2,×ܽøÆøѹÁ¦Öµ
| 2013,MainVacuum,l2,×ÜÕæ¿ÕѹÁ¦Öµ
| 2014,RbMainVacuum,l2,»úÆ÷ÈËÕæ¿ÕÖµ
| 2015,LPMainVacuum,l2,LPÕæ¿ÕÖµ#D265
| 2016,LPMainAir,U2,LPѹ¿ÕÖµ
| 2017,ALVacuum,l2,AlignerÕæ¿ÕÖµ
| 2018,FFU1RPM,U2,FFU1תËÙ
| 2019,FFU2RPM,U2,FFU2תËÙ
| 2020,FFU3RPM,U2,FFU3תËÙ
| 2021,FFU4RPM,U2,FFU4תËÙ
| 2022,ESDValue,I2,¾²µç¼ì²âÖµ
| 2023,OCREnable,U2,"OCRʹÄÜ£ºO:¿ªÆô 1£ºÆÁ±Î"
| 2024,CCDEnable,U2,"CCDʹÄÜ£ºO:¿ªÆô 1£ºÆÁ±Î"
| 2025,FFUParameter,U2,FFUÉ趨ֵ
| 5000,CarrierID,A20,¿¨Ï»ID
| 5001,CJobSpace,U1,CJ Space
| 5002,PJobSpace,U1,PJ Space
| 5003,PJQueued,L,PJ Queued
|
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