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| [LoadPort 1]
| Left=23
| Top=88
| [LoadPort 2]
| Left=23
| Top=437
| [LoadPort 3]
| Left=1253
| Top=297
| [LoadPort 4]
| Left=1253
| Top=457
| [EFEM(ROBOT)]
| Left=294
| Top=63
| [Bonder 1]
| Left=659
| Top=297
| [Bonder 2]
| Left=659
| Top=437
| [Fliper]
| Left=279
| Top=297
| [Aligner]
| Left=210
| Top=317
| [VacuumBake]
| Left=279
| Top=437
| [BakeCooling]
| Left=853
| Top=363
| [ARM]
| Left=628
| Top=63
| [Arm Tray1]
| Left=467
| Top=63
| [Arm Tray2]
| Left=467
| Top=167
| [Fliper(G2)]
| Left=413
| Top=285
| [VacuumBake(G1)]
| Left=413
| Top=437
| [Measurement]
| Left=1041
| Top=363
|
|
